Hideki ITAI

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam device having inspection scan direction based...
- Patent number 10,984,981
- Issue date Apr 20, 2021
- HITACHI HIGH-TECH CORPORATION
- Hideki Itai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device for imaging vias inside trenches
- Patent number 10,984,980
- Issue date Apr 20, 2021
- HITACHI HIGH-TECH CORPORATION
- Kei Sakai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 10,665,420
- Issue date May 26, 2020
- Hitachi High-Technologies Corporation
- Yasunori Takasugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,546,715
- Issue date Jan 28, 2020
- Hitachi High-Technologies Corporation
- Shahedul Hoque
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20190295815
- Publication date Sep 26, 2019
- Hitachi High-Technologies Corporation
- Yasunori TAKASUGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20190035600
- Publication date Jan 31, 2019
- Hitachi High-Technologies Corporation
- Kei SAKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device Having Inspection Scan Direction Based...
- Publication number 20180374674
- Publication date Dec 27, 2018
- Hitachi High-Technologies Corporation
- Hideki ITAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20180269026
- Publication date Sep 20, 2018
- Hitachi High-Technologies Corporation
- Shahedul HOQUE
- G02 - OPTICS
Information Patent Application
Charged Particle Beam Device
- Publication number 20170323763
- Publication date Nov 9, 2017
- Hideki ITAI
- H01 - BASIC ELECTRIC ELEMENTS