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Plasma processing apparatus
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Patent number 11,482,435
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Issue date Oct 25, 2022
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HITACHI HIGH-TECH CORPORATION
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Masatoshi Kawakami
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing apparatus and method
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Patent number 8,795,467
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Issue date Aug 5, 2014
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Hitachi High-Technologies Corporation
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Ryoji Nishio
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vacuum processing apparatus
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Patent number 8,460,467
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Issue date Jun 11, 2013
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Hitachi High-Technologies Corporation
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Akitaka Makino
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Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Plasma processing apparatus and method
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Patent number 8,062,473
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Issue date Nov 22, 2011
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Hitachi High-Technologies Corporation
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Ryoji Nishio
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vacuum processing apparatus
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Patent number 7,976,632
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Issue date Jul 12, 2011
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Hitachi High-Technologies Corporation
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Akitaka Makino
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Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Vacuum processing apparatus
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Patent number 7,833,382
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Issue date Nov 16, 2010
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Hitachi High-Technologies Corporation
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Akitaka Makino
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Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Plasma processing method
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Patent number 7,833,429
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Issue date Nov 16, 2010
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Hitachi High-Technologies Corporation
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Ryoji Nishio
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vacuum processing apparatus
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Patent number 7,828,928
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Issue date Nov 9, 2010
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Hitachi High-Technologies Corporation
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Akitaka Makino
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Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Plasma processing apparatus and method
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Patent number 7,740,739
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Issue date Jun 22, 2010
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Hitachi High-Technologies Corporation
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Ryoji Nishio
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma processing apparatus
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Patent number 7,674,351
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Issue date Mar 9, 2010
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Hitachi High-Technologies Corporation
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Akitaka Makino
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing apparatus
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Patent number 7,416,633
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Issue date Aug 26, 2008
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Hitachi High-Technologies Corporation
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Akitaka Makino
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H01 - BASIC ELECTRIC ELEMENTS
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Vacuum processing apparatus
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Patent number 7,335,277
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Issue date Feb 26, 2008
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Hitachi High-Technologies Corporation
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Akitaka Makino
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H01 - BASIC ELECTRIC ELEMENTS
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Vacuum processing apparatus
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Patent number 7,296,783
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Issue date Nov 20, 2007
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Hitachi High-Technologies Corporation
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Hideki Kihara
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F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
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Vacuum processing apparatus
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Patent number 7,247,207
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Issue date Jul 24, 2007
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Hitachi High-Technologies Corporation
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Akitaka Makino
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H01 - BASIC ELECTRIC ELEMENTS
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Wafer processing method
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Patent number 7,138,606
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Issue date Nov 21, 2006
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Hitachi High-Technologies Corporation
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Seiichiro Kanno
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H01 - BASIC ELECTRIC ELEMENTS
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