Hideki Kiryu

Follow

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming a dielectric film
- Patent number 6,866,890
- Issue date Mar 15, 2005
- Tokyo Electron Limited
- Hideki Kiryu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for forming a stacked gate insulating film
- Patent number 6,617,207
- Issue date Sep 9, 2003
- Tokyo Electron Limited
- Hideki Kiryu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus and processing method
- Patent number 6,467,491
- Issue date Oct 22, 2002
- Tokyo Electron Limited
- Masahito Sugiura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method for film formation of gate insulator, apparatus for film for...
- Publication number 20040053472
- Publication date Mar 18, 2004
- Hideki Kiryu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming a dielectric film
- Publication number 20040005408
- Publication date Jan 8, 2004
- Hideki Kiryu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...