HIDEKI KOMATSUDA

Person

KAWASAKI-SHI, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Image-forming optical system, exposure apparatus, and device produc...
- Patent number 12,105,428
- Issue date Oct 1, 2024
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light source apparatus, optical apparatus, exposure apparatus, devi...
- Patent number 11,934,104
- Issue date Mar 19, 2024
- Nikon Corporation
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Grant
Image-forming optical system, exposure apparatus, and device produc...
- Patent number 11,467,501
- Issue date Oct 11, 2022
- Nikon Corporation
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Grant
Light source apparatus, optical apparatus, exposure apparatus, devi...
- Patent number 11,353,795
- Issue date Jun 7, 2022
- Nikon Corporation
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Grant
Image-forming optical system, exposure apparatus, and device produc...
- Patent number 10,866,522
- Issue date Dec 15, 2020
- Nikon Corporation
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Grant
Light source apparatus, optical apparatus, exposure apparatus, devi...
- Patent number 10,831,106
- Issue date Nov 10, 2020
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination device
- Patent number 10,459,343
- Issue date Oct 29, 2019
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light source apparatus, optical apparatus, exposure apparatus, devi...
- Patent number 10,345,708
- Issue date Jul 9, 2019
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Image-forming optical system, exposure apparatus, and device produc...
- Patent number 10,228,623
- Issue date Mar 12, 2019
- Nikon Corporation
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Grant
Illumination device
- Patent number 10,162,269
- Issue date Dec 25, 2018
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Image-forming optical system, exposure apparatus, and device produc...
- Patent number 9,939,733
- Issue date Apr 10, 2018
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination device
- Patent number 9,760,012
- Issue date Sep 12, 2017
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light source apparatus, optical apparatus, exposure apparatus, devi...
- Patent number 9,703,204
- Issue date Jul 11, 2017
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Image-forming optical system, exposure apparatus, and device produc...
- Patent number 9,557,548
- Issue date Jan 31, 2017
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reflecting optical member, optical system, exposure apparatus, and...
- Patent number 9,477,156
- Issue date Oct 25, 2016
- Nikon Corporation
- Hideo Takino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical apparatus, exposure apparatus, and device manu...
- Patent number 9,195,069
- Issue date Nov 24, 2015
- Nikon Corporation
- Hirohisa Tanaka
- G02 - OPTICS
Information Patent Grant
Illumination optical apparatus, exposure apparatus, and device manu...
- Patent number 8,780,328
- Issue date Jul 15, 2014
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and electronic device manufacturing method
- Patent number 8,467,032
- Issue date Jun 18, 2013
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical apparatus, exposure apparatus, and device manu...
- Patent number 8,081,296
- Issue date Dec 20, 2011
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 8,023,103
- Issue date Sep 20, 2011
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lighting apparatus, exposure apparatus and microdevice manufacturin...
- Patent number 7,800,734
- Issue date Sep 21, 2010
- Nikon Corporation
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Grant
Projection optical system, exposure apparatus, and exposure method
- Patent number 7,483,122
- Issue date Jan 27, 2009
- Nikon Corporation
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Grant
Optical integrator, illumination optical device, exposure device, a...
- Patent number 7,471,456
- Issue date Dec 30, 2008
- Nikon Corporation
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Grant
Illumination systems, exposure apparatus, and microdevice-manufactu...
- Patent number 7,446,856
- Issue date Nov 4, 2008
- Nikon Corporation
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Grant
Projection optical system, exposure apparatus, and exposure method...
- Patent number 7,312,851
- Issue date Dec 25, 2007
- Nikon Corporation
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Grant
Exposure system and exposure method
- Patent number 7,023,523
- Issue date Apr 4, 2006
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system and exposure apparatus and method
- Patent number 7,023,953
- Issue date Apr 4, 2006
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and exposure method using same
- Patent number 6,842,500
- Issue date Jan 11, 2005
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method of fabricating a micro-device using t...
- Patent number 6,833,904
- Issue date Dec 21, 2004
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system, exposure apparatus, and microdevice ma...
- Patent number 6,819,403
- Issue date Nov 16, 2004
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...
- Publication number 20250013156
- Publication date Jan 9, 2025
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIGHT SOURCE APPARATUS, OPTICAL APPARATUS, EXPOSURE APPARATUS, DEVI...
- Publication number 20240176248
- Publication date May 30, 2024
- Nikon Corporation
- Hideki KOMATSUDA
- G02 - OPTICS
Information Patent Application
IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...
- Publication number 20230024028
- Publication date Jan 26, 2023
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIGHT SOURCE APPARATUS, OPTICAL APPARATUS, EXPOSURE APPARATUS, DEVI...
- Publication number 20220260923
- Publication date Aug 18, 2022
- Nikon Corporation
- Hideki KOMATSUDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...
- Publication number 20210200100
- Publication date Jul 1, 2021
- Nikon Corporation
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Application
LIGHT SOURCE APPARATUS, OPTICAL APPARATUS, EXPOSURE APPARATUS, DEVI...
- Publication number 20210026251
- Publication date Jan 28, 2021
- Nikon Corporation
- Hideki KOMATSUDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...
- Publication number 20190302621
- Publication date Oct 3, 2019
- Nikon Corporation
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Application
LIGHT SOURCE APPARATUS, OPTICAL APPARATUS, EXPOSURE APPARATUS, DEVI...
- Publication number 20190302435
- Publication date Oct 3, 2019
- Nikon Corporation
- Hideki KOMATSUDA
- G02 - OPTICS
Information Patent Application
ILLUMINATION DEVICE
- Publication number 20190086812
- Publication date Mar 21, 2019
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...
- Publication number 20180210347
- Publication date Jul 26, 2018
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION DEVICE
- Publication number 20170343902
- Publication date Nov 30, 2017
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIGHT SOURCE APPARATUS, OPTICAL APPARATUS, EXPOSURE APPARATUS, DEVI...
- Publication number 20170285314
- Publication date Oct 5, 2017
- Nikon Corporation
- Hideki KOMATSUDA
- G02 - OPTICS
Information Patent Application
IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...
- Publication number 20170146911
- Publication date May 25, 2017
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL DEVICE, OPTICAL UNIT, ILLUMINATION METHOD, AND...
- Publication number 20140293254
- Publication date Oct 2, 2014
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Application
ILLUMINATION DEVICE
- Publication number 20140218705
- Publication date Aug 7, 2014
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTERMITTENT TEMPERATURE CONTROL OF MOVABLE OPTICAL ELEMENTS
- Publication number 20140176931
- Publication date Jun 26, 2014
- Nikon Corporation
- Alton H. Phillips
- G02 - OPTICS
Information Patent Application
REFLECTING OPTICAL MEMBER, OPTICAL SYSTEM, EXPOSURE APPARATUS, AND...
- Publication number 20130335720
- Publication date Dec 19, 2013
- Hideo Takino
- G02 - OPTICS
Information Patent Application
LIGHT SOURCE APPARATUS, OPTICAL APPARATUS, EXPOSURE APPARATUS, DEVI...
- Publication number 20130128248
- Publication date May 23, 2013
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Application
IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...
- Publication number 20120287413
- Publication date Nov 15, 2012
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Application
LIGHT SOURCE APPARATUS, EXPOSURE APPARATUS, AND ELECTRONIC DEVICE M...
- Publication number 20110109890
- Publication date May 12, 2011
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANU...
- Publication number 20100141922
- Publication date Jun 10, 2010
- Hideki KOMATSUDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and electronic device manufacturing method
- Publication number 20090257042
- Publication date Oct 15, 2009
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ATTENUATOR PLATE, EXPOSURE APPARATUS, EXPOSURE METHOD, AND...
- Publication number 20090239178
- Publication date Sep 24, 2009
- NIKON CORPORATION
- Junji Ikeda
- G02 - OPTICS
Information Patent Application
REFLECTIVE PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE MA...
- Publication number 20090135510
- Publication date May 28, 2009
- Takuro Ono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANU...
- Publication number 20090046265
- Publication date Feb 19, 2009
- Hideki KOMATSUDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, ILLUMINATION OPTICAL APPARATUS, EXPOSU...
- Publication number 20090040493
- Publication date Feb 12, 2009
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEMS, EXPOSURE APPARATUS, AND MICRODEVICE-MANUFACTU...
- Publication number 20090033903
- Publication date Feb 5, 2009
- NIKON CORPORATION
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Application
Lighting Apparatus, Exposure Apparatus And Microdevice Manufacturin...
- Publication number 20090002662
- Publication date Jan 1, 2009
- Nikon Corporation
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Application
Projection optical system, exposure apparatus, and exposure method
- Publication number 20080079924
- Publication date Apr 3, 2008
- Nikon Corporation
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Application
Illumination optical apparatus, exposure apparatus, and device manu...
- Publication number 20070273859
- Publication date Nov 29, 2007
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

HIDEKI KOMATSUDA

Person

Patents Grantslast 30 patents

Image-forming optical system, exposure apparatus, and device produc...

Light source apparatus, optical apparatus, exposure apparatus, devi...

Image-forming optical system, exposure apparatus, and device produc...

Light source apparatus, optical apparatus, exposure apparatus, devi...

Image-forming optical system, exposure apparatus, and device produc...

Light source apparatus, optical apparatus, exposure apparatus, devi...

Illumination device

Light source apparatus, optical apparatus, exposure apparatus, devi...

Image-forming optical system, exposure apparatus, and device produc...

Illumination device

Image-forming optical system, exposure apparatus, and device produc...

Illumination device

Light source apparatus, optical apparatus, exposure apparatus, devi...

Image-forming optical system, exposure apparatus, and device produc...

Reflecting optical member, optical system, exposure apparatus, and...

Illumination optical apparatus, exposure apparatus, and device manu...

Illumination optical apparatus, exposure apparatus, and device manu...

Exposure apparatus and electronic device manufacturing method

Illumination optical apparatus, exposure apparatus, and device manu...

Exposure apparatus, exposure method, and method for producing device

Lighting apparatus, exposure apparatus and microdevice manufacturin...

Projection optical system, exposure apparatus, and exposure method

Optical integrator, illumination optical device, exposure device, a...

Illumination systems, exposure apparatus, and microdevice-manufactu...

Projection optical system, exposure apparatus, and exposure method...

Exposure system and exposure method

Illumination system and exposure apparatus and method

Exposure apparatus and exposure method using same

Exposure apparatus and method of fabricating a micro-device using t...

Illumination optical system, exposure apparatus, and microdevice ma...

Patents Applicationslast 30 patents

IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...

LIGHT SOURCE APPARATUS, OPTICAL APPARATUS, EXPOSURE APPARATUS, DEVI...

IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...

LIGHT SOURCE APPARATUS, OPTICAL APPARATUS, EXPOSURE APPARATUS, DEVI...

IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...

LIGHT SOURCE APPARATUS, OPTICAL APPARATUS, EXPOSURE APPARATUS, DEVI...

IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...

LIGHT SOURCE APPARATUS, OPTICAL APPARATUS, EXPOSURE APPARATUS, DEVI...

ILLUMINATION DEVICE

IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...

ILLUMINATION DEVICE

LIGHT SOURCE APPARATUS, OPTICAL APPARATUS, EXPOSURE APPARATUS, DEVI...

IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...

ILLUMINATION OPTICAL DEVICE, OPTICAL UNIT, ILLUMINATION METHOD, AND...

ILLUMINATION DEVICE

INTERMITTENT TEMPERATURE CONTROL OF MOVABLE OPTICAL ELEMENTS

REFLECTING OPTICAL MEMBER, OPTICAL SYSTEM, EXPOSURE APPARATUS, AND...

LIGHT SOURCE APPARATUS, OPTICAL APPARATUS, EXPOSURE APPARATUS, DEVI...

IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...

LIGHT SOURCE APPARATUS, EXPOSURE APPARATUS, AND ELECTRONIC DEVICE M...

ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANU...

Exposure apparatus and electronic device manufacturing method

OPTICAL ATTENUATOR PLATE, EXPOSURE APPARATUS, EXPOSURE METHOD, AND...

REFLECTIVE PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE MA...

ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANU...

ILLUMINATION OPTICAL SYSTEM, ILLUMINATION OPTICAL APPARATUS, EXPOSU...

ILLUMINATION SYSTEMS, EXPOSURE APPARATUS, AND MICRODEVICE-MANUFACTU...

Lighting Apparatus, Exposure Apparatus And Microdevice Manufacturin...

Projection optical system, exposure apparatus, and exposure method

Illumination optical apparatus, exposure apparatus, and device manu...