Hideki Konishi

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 9,396,960
- Issue date Jul 19, 2016
- Tokyo Electron Limited
- Kazuto Ogawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20150243521
- Publication date Aug 27, 2015
- TOKYO ELECTRON LIMITED
- Kazuto Ogawa
- H01 - BASIC ELECTRIC ELEMENTS