Hideki MATSUI

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Yokohama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam writing method and charged particle beam writ...
- Patent number 11,282,674
- Issue date Mar 22, 2022
- NuFlare Technology, Inc.
- Hideki Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 10,622,186
- Issue date Apr 14, 2020
- NuFlare Technology, Inc.
- Takuya Uemura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam drawing apparatus and charged particle beam d...
- Patent number 9,812,284
- Issue date Nov 7, 2017
- NuFlare Technology, Inc.
- Hideki Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam writing apparatus and electron beam writing method
- Patent number 9,281,161
- Issue date Mar 8, 2016
- NuFlare Technology, Inc.
- Hideki Matsui
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD AND CHARGED PARTICLE BEAM WRIT...
- Publication number 20200273666
- Publication date Aug 27, 2020
- NuFlare Technology, Inc.
- Hideki MATSUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20190333734
- Publication date Oct 31, 2019
- NuFlare Technology, Inc.
- Hideki MATSUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20190189389
- Publication date Jun 20, 2019
- NuFlare Technology, Inc.
- Takuya UEMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM D...
- Publication number 20160343535
- Publication date Nov 24, 2016
- NuFlare Technology, Inc.
- Hideki MATSUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM WRITING APPARATUS AND ELECTRON BEAM WRITING METHOD
- Publication number 20150332890
- Publication date Nov 19, 2015
- NuFlare Technology, Inc.
- Hideki MATSUI
- H01 - BASIC ELECTRIC ELEMENTS