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Hideki Mizuno
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Boise, ID, US
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Patents Grants
last 30 patents
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Patent Grant
Plasma etching method and plasma etching apparatus
Patent number
9,530,666
Issue date
Dec 27, 2016
Tokyo Electron Limited
Hideki Mizuno
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
Publication number
20150235861
Publication date
Aug 20, 2015
Tokyo Electron Limited
Hideki Mizuno
H01 - BASIC ELECTRIC ELEMENTS