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Kasugai-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle beam exposure system and method
Patent number
6,646,275
Issue date
Nov 11, 2003
Fujitsu Limited
Yoshihisa Oae
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam exposure system and method
Patent number
6,486,479
Issue date
Nov 26, 2002
Fujitsu Limited
Yoshihisa Oae
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged-particle-beam exposure device and charged-particle-beam exp...
Patent number
6,242,751
Issue date
Jun 5, 2001
Fujitsu Limited
Akio Takemoto
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method and system for exposing an exposure pattern on an object by...
Patent number
6,118,129
Issue date
Sep 12, 2000
Fujitsu Limited
Yoshihisa Oae
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam exposure system and method
Patent number
5,977,548
Issue date
Nov 2, 1999
Fujitsu Limited
Yoshihisa Oae
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged-particle-beam exposure device and charged-particle-beam exp...
Patent number
5,969,365
Issue date
Oct 19, 1999
Fujitsu Limited
Akio Takemoto
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam exposure system
Patent number
5,920,077
Issue date
Jul 6, 1999
Fujitsu Limited
Yoshihisa Oae
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged-particle-beam exposure device and charged-particle-beam exp...
Patent number
5,757,015
Issue date
May 26, 1998
Fujitsu Limited
Akio Takemoto
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam exposure system and method
Patent number
5,614,725
Issue date
Mar 25, 1997
Fujitsu Limited
Yoshihisa Oae
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam exposure system and method
Patent number
5,528,048
Issue date
Jun 18, 1996
Fujitsu Limited
Yoshihisa Oae
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
Charged particle beam exposure system and method
Publication number
20030025088
Publication date
Feb 6, 2003
FUJITSU LIMITED
Yoshihisa Oae
B82 - NANO-TECHNOLOGY
Information
Patent Application
Charged-particle-beam exposure device and charged-particle-beam exp...
Publication number
20010013581
Publication date
Aug 16, 2001
Akio Takemoto
B82 - NANO-TECHNOLOGY