Hideki NISHIMURA

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Tosu-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,770,284
- Issue date Sep 8, 2020
- Tokyo Electron Limited
- Hiroki Yonekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid treatment apparatus, method of cleaning substrate...
- Patent number 10,037,901
- Issue date Jul 31, 2018
- Tokyo Electron Limited
- Kazuya Koyama
- B08 - CLEANING
Information Patent Grant
Method for removing metal contamination and apparatus for removing...
- Patent number 9,875,915
- Issue date Jan 23, 2018
- Tokyo Electron Limited
- Yudai Ito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method, and program storage medium therefor
- Patent number 8,266,820
- Issue date Sep 18, 2012
- Tokyo Electron Limited
- Hideki Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, substrate processing apparatus, and pr...
- Patent number 8,020,315
- Issue date Sep 20, 2011
- Tokyo Electron Limited
- Hideki Nishimura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180182616
- Publication date Jun 28, 2018
- TOKYO ELECTRON LIMITED
- Hiroki Yonekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR REMOVING METAL CONTAMINATION AND APPARATUS FOR REMOVING...
- Publication number 20160175898
- Publication date Jun 23, 2016
- TOKYO ELECTRON LIMITED
- Yudai Ito
- B08 - CLEANING
Information Patent Application
SUBSTRATE LIQUID TREATMENT APPARATUS, METHOD OF CLEANING SUBSTRATE...
- Publication number 20150328668
- Publication date Nov 19, 2015
- TOKYO ELECTRON LIMITED
- Kazuya KOYAMA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD, AND PROGRAM STORAGE MEDIUM THEREFOR
- Publication number 20110296707
- Publication date Dec 8, 2011
- TOKYO ELECTRON LIMITED
- Hideki NISHIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE, RECYCLING METHOD OF FILTRATION MATERIA...
- Publication number 20100223805
- Publication date Sep 9, 2010
- TOKYO ELECTRON LIMITED
- Hironobu HYAKUTAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method, substrate processing apparatus, and pr...
- Publication number 20080060214
- Publication date Mar 13, 2008
- Hideki Nishimura
- H01 - BASIC ELECTRIC ELEMENTS