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Tochigi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Exposure apparatus
Patent number
7,755,740
Issue date
Jul 13, 2010
Canon Kabushiki Kaisha
Izumi Tsukamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate attracting and holding system for use in exposure apparatus
Patent number
6,809,802
Issue date
Oct 26, 2004
Canon Kabushiki Kaisha
Izumi Tsukamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Exposure apparatus
Patent number
6,801,301
Issue date
Oct 5, 2004
Canon Kabushiki Kaisha
Yoshikazu Miyajima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate attracting and holding system for use in exposure apparatus
Patent number
6,762,826
Issue date
Jul 13, 2004
Canon Kabushiki Kaisha
Izumi Tsukamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Moving mechanism in exposure apparatus, and exposure apparatus havi...
Patent number
6,717,653
Issue date
Apr 6, 2004
Canon Kabushiki Kaisha
Kazunori Iwamoto
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Exposure apparatus and device manufacturing method
Patent number
6,665,046
Issue date
Dec 16, 2003
Canon Kabushiki Kaisha
Hideki Nogawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, and device manufacturing method
Patent number
6,654,096
Issue date
Nov 25, 2003
Canon Kabushiki Kaisha
Itaru Fujita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus
Patent number
6,642,996
Issue date
Nov 4, 2003
Canon Kabushiki Kaisha
Hideki Nogawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus
Patent number
6,133,982
Issue date
Oct 17, 2000
Canon Kabushiki Kaisha
Mitsuru Inoue
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus including an optical characteristic d...
Patent number
5,925,887
Issue date
Jul 20, 1999
Canon Kabushiki Kaisha
Fumio Sakai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mark detecting method and apparatus
Patent number
4,962,423
Issue date
Oct 9, 1990
Canon Kabushiki Kaisha
Yuichi Yamada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of detecting position of a mark
Patent number
4,933,715
Issue date
Jun 12, 1990
Canon Kabushiki Kaisha
Yuichi Yamada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
EXPOSURE APPARATUS
Publication number
20080187872
Publication date
Aug 7, 2008
Canon Kabushiki Kaisha
Izumi Tsukamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate attracting and holding system for use in exposure apparatus
Publication number
20040036850
Publication date
Feb 26, 2004
Canon Kabushiki Kaisha
Izumi Tsukamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus
Publication number
20030071982
Publication date
Apr 17, 2003
Canon Kabushiki Kaisha
Yoshikazu Miyajima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus
Publication number
20020057423
Publication date
May 16, 2002
Hideki Nogawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus and device manufacturing method
Publication number
20020018190
Publication date
Feb 14, 2002
Hideki Nogawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Moving mechanism in exposure apparatus, and exposure apparatus havi...
Publication number
20020018195
Publication date
Feb 14, 2002
Kazunori Iwamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY