Hideki Nogawa

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus
- Patent number 7,755,740
- Issue date Jul 13, 2010
- Canon Kabushiki Kaisha
- Izumi Tsukamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate attracting and holding system for use in exposure apparatus
- Patent number 6,809,802
- Issue date Oct 26, 2004
- Canon Kabushiki Kaisha
- Izumi Tsukamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus
- Patent number 6,801,301
- Issue date Oct 5, 2004
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate attracting and holding system for use in exposure apparatus
- Patent number 6,762,826
- Issue date Jul 13, 2004
- Canon Kabushiki Kaisha
- Izumi Tsukamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Moving mechanism in exposure apparatus, and exposure apparatus havi...
- Patent number 6,717,653
- Issue date Apr 6, 2004
- Canon Kabushiki Kaisha
- Kazunori Iwamoto
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 6,665,046
- Issue date Dec 16, 2003
- Canon Kabushiki Kaisha
- Hideki Nogawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 6,654,096
- Issue date Nov 25, 2003
- Canon Kabushiki Kaisha
- Itaru Fujita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 6,642,996
- Issue date Nov 4, 2003
- Canon Kabushiki Kaisha
- Hideki Nogawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 6,133,982
- Issue date Oct 17, 2000
- Canon Kabushiki Kaisha
- Mitsuru Inoue
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus including an optical characteristic d...
- Patent number 5,925,887
- Issue date Jul 20, 1999
- Canon Kabushiki Kaisha
- Fumio Sakai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mark detecting method and apparatus
- Patent number 4,962,423
- Issue date Oct 9, 1990
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of detecting position of a mark
- Patent number 4,933,715
- Issue date Jun 12, 1990
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS
- Publication number 20080187872
- Publication date Aug 7, 2008
- Canon Kabushiki Kaisha
- Izumi Tsukamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate attracting and holding system for use in exposure apparatus
- Publication number 20040036850
- Publication date Feb 26, 2004
- Canon Kabushiki Kaisha
- Izumi Tsukamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20030071982
- Publication date Apr 17, 2003
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20020057423
- Publication date May 16, 2002
- Hideki Nogawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20020018190
- Publication date Feb 14, 2002
- Hideki Nogawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Moving mechanism in exposure apparatus, and exposure apparatus havi...
- Publication number 20020018195
- Publication date Feb 14, 2002
- Kazunori Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hideki Nogawa

Person

Patents Grantslast 30 patents

Exposure apparatus

Substrate attracting and holding system for use in exposure apparatus

Exposure apparatus

Substrate attracting and holding system for use in exposure apparatus

Moving mechanism in exposure apparatus, and exposure apparatus havi...

Exposure apparatus and device manufacturing method

Exposure apparatus, and device manufacturing method

Exposure apparatus

Exposure apparatus

Projection exposure apparatus including an optical characteristic d...

Mark detecting method and apparatus

Method of detecting position of a mark

Patents Applicationslast 30 patents

EXPOSURE APPARATUS

Substrate attracting and holding system for use in exposure apparatus

Exposure apparatus

Exposure apparatus

Exposure apparatus and device manufacturing method

Moving mechanism in exposure apparatus, and exposure apparatus havi...