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Hideki Satou
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Thin film fabrication method and thin film fabrication apparatus
Patent number
6,872,289
Issue date
Mar 29, 2005
Anelva Corporation
Shigeru Mizuno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thin film fabrication method and thin film fabrication apparatus
Patent number
6,348,238
Issue date
Feb 19, 2002
Anelva Corporation
Shigeru Mizuno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Thin film fabrication method and thin film fabrication apparatus
Publication number
20010009220
Publication date
Jul 26, 2001
Shigeru Mizuno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...