Hideki SHIMIZU

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Kyoto-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus with a cleaning processing section f...
- Patent number 9,436,087
- Issue date Sep 6, 2016
- SCREEN Holdings Co., Ltd.
- Kazuo Morioka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150013603
- Publication date Jan 15, 2015
- Dainippon Screen Mfg. Co., Ltd.
- Kazuo MORIOKA
- B08 - CLEANING