Hideki SUGIYAMA

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Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230268164
- Publication date Aug 24, 2023
- TOKYO ELECTRON LIMITED
- Hideki SUGIYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230260757
- Publication date Aug 17, 2023
- TOKYO ELECTRON LIMITED
- Hideki SUGIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, AND EDG...
- Publication number 20210020408
- Publication date Jan 21, 2021
- TOKYO ELECTRON LIMITED
- Hideki SUGIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE STAGE AND PLASMA PROCESSING APPARATUS
- Publication number 20080087382
- Publication date Apr 17, 2008
- TOKYO ELECTRON LIMITED
- Hideki SUGIYAMA
- H01 - BASIC ELECTRIC ELEMENTS