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Hideki Takayanagi
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate holding apparatus
Patent number
7,850,509
Issue date
Dec 14, 2010
Ebara Corporation
Tetsuji Togawa
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate holding apparatus
Patent number
7,491,117
Issue date
Feb 17, 2009
Ebara Corporation
Tetsuji Togawa
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate polishing machine
Patent number
7,156,725
Issue date
Jan 2, 2007
Ebara Corporation
Tetsuji Togawa
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate holding apparatus
Patent number
7,083,507
Issue date
Aug 1, 2006
Ebara Corporation
Tetsuji Togawa
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate holding apparatus
Patent number
6,852,019
Issue date
Feb 8, 2005
Ebara Corporation
Tetsuji Togawa
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
Substrate holding apparatus
Publication number
20090061748
Publication date
Mar 5, 2009
Tetsuji TOGAWA
B24 - GRINDING POLISHING
Information
Patent Application
Substrate holding apparatus
Publication number
20060234609
Publication date
Oct 19, 2006
Tetsuji Togawa
B24 - GRINDING POLISHING
Information
Patent Application
Substrate holding apparatus
Publication number
20050118935
Publication date
Jun 2, 2005
Tetsuji Togawa
B24 - GRINDING POLISHING
Information
Patent Application
Substrate polishing machine
Publication number
20040209560
Publication date
Oct 21, 2004
Tetsuji Togawa
B24 - GRINDING POLISHING
Information
Patent Application
Substrate holding apparatus
Publication number
20020042246
Publication date
Apr 11, 2002
Tetsuji Togawa
B24 - GRINDING POLISHING