Hideki Takayanagi

Person

  • Tokyo, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate holding apparatus

    • Patent number 7,850,509
    • Issue date Dec 14, 2010
    • Ebara Corporation
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Substrate holding apparatus

    • Patent number 7,491,117
    • Issue date Feb 17, 2009
    • Ebara Corporation
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Substrate polishing machine

    • Patent number 7,156,725
    • Issue date Jan 2, 2007
    • Ebara Corporation
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Substrate holding apparatus

    • Patent number 7,083,507
    • Issue date Aug 1, 2006
    • Ebara Corporation
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Substrate holding apparatus

    • Patent number 6,852,019
    • Issue date Feb 8, 2005
    • Ebara Corporation
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

  • Information Patent Application

    Substrate holding apparatus

    • Publication number 20090061748
    • Publication date Mar 5, 2009
    • Tetsuji TOGAWA
    • B24 - GRINDING POLISHING
  • Information Patent Application

    Substrate holding apparatus

    • Publication number 20060234609
    • Publication date Oct 19, 2006
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING
  • Information Patent Application

    Substrate holding apparatus

    • Publication number 20050118935
    • Publication date Jun 2, 2005
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING
  • Information Patent Application

    Substrate polishing machine

    • Publication number 20040209560
    • Publication date Oct 21, 2004
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING
  • Information Patent Application

    Substrate holding apparatus

    • Publication number 20020042246
    • Publication date Apr 11, 2002
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING