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Hideki Tateishi
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Yokohama, JP
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last 30 patents
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Patent Grant
Sputtering process and an apparatus for carrying out the same
Patent number
4,853,102
Issue date
Aug 1, 1989
Hitachi, Ltd.
Hideki Tateishi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Continuous sputtering apparatus
Patent number
4,675,096
Issue date
Jun 23, 1987
Hitachi, Ltd.
Hideki Tateishi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for sputtering
Patent number
4,610,770
Issue date
Sep 9, 1986
Hitachi, Ltd.
Hiroshi Saito
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for performing continuous treatment in vacuum
Patent number
4,405,435
Issue date
Sep 20, 1983
Hitachi, Ltd.
Hideki Tateishi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering cathode structure for sputtering apparatuses, method of...
Patent number
4,401,539
Issue date
Aug 30, 1983
Hitachi, Ltd.
Katsuo Abe
H01 - BASIC ELECTRIC ELEMENTS