Hideki Yoshikawa

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Nirasaki, JP

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Patents Grantslast 30 patents

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Apparatus and method for delivery of precursor vapor from low vapor...
- Patent number 6,548,112
- Issue date Apr 15, 2003
- Tokyo Electron Limited
- Joseph T. Hillman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a titanium film and a barrier film on a surface o...
- Patent number 6,537,621
- Issue date Mar 25, 2003
- Tokyo Electron Limited
- Yasuo Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD-Ti film forming method
- Patent number 6,197,674
- Issue date Mar 6, 2001
- Tokyo Electron Limited
- Hideki Yoshikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a titanium film and a barrier metal film on a sur...
- Patent number 6,051,281
- Issue date Apr 18, 2000
- Tokyo Electron Limited
- Yasuo Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...