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Kawasaki, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Etching and cleaning methods and etching and cleaning apparatuses u...
Patent number
8,420,549
Issue date
Apr 16, 2013
Renesas Electronics Corporation
Shinya Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for manufacturing semiconductor device and semiconductor device
Patent number
8,129,287
Issue date
Mar 6, 2012
Renesas Electronics Corporation
Tatsuya Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method for semiconductor device
Patent number
7,943,516
Issue date
May 17, 2011
Renesas Electronics Corporation
Hidemitsu Aoki
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Etching and cleaning methods and etching and cleaning apparatuses u...
Patent number
7,862,658
Issue date
Jan 4, 2011
Renesas Electronics Corporation
Shinya Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming a high-k film on a semiconductor device
Patent number
7,718,532
Issue date
May 18, 2010
NEC Electronics Corporation
Hiroaki Tomimori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for manufacturing same
Patent number
7,687,918
Issue date
Mar 30, 2010
NEC Electronics Corporation
Yorinobu Kunimune
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Removing solution, cleaning method for semiconductor substrate, and...
Patent number
7,592,266
Issue date
Sep 22, 2009
NEC Electronics Corporation
Hidemitsu Aoki
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Process for making a semiconductor device having a roughened surface
Patent number
7,560,372
Issue date
Jul 14, 2009
NEC Electronics Corporation
Hiroaki Tomimori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for removing contamination and method for fabricating semico...
Patent number
7,442,652
Issue date
Oct 28, 2008
NEC Electronics Corporation
Hidemitsu Aoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device and semiconductor device
Patent number
7,402,530
Issue date
Jul 22, 2008
NEC Electronics Corporation
Tatsuya Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cleaning solution and manufacturing method for semiconductor device
Patent number
7,368,064
Issue date
May 6, 2008
NEC Electronics Corporation
Hidemitsu Aoki
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Tungsten metal removing solution and method for removing tungsten m...
Patent number
7,351,354
Issue date
Apr 1, 2008
Kanto Kagaku Kabushiki Kaisha
Toshikazu Shimizu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cleaning solution for semiconductor substrate
Patent number
7,312,186
Issue date
Dec 25, 2007
Kanto Chemical Co., Inc.
Masayuki Takashima
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Removing solution, cleaning method for semiconductor substrate, and...
Patent number
7,312,160
Issue date
Dec 25, 2007
NEC Electronics Corporation
Hidemitsu Aoki
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Manufacturing method of semiconductor device
Patent number
7,268,087
Issue date
Sep 11, 2007
NEC Electronics Corporation
Hidemitsu Aoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming a high-k film on a semiconductor device
Patent number
7,192,835
Issue date
Mar 20, 2007
NEC Electronics Corporation
Hiroaki Tomimori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Anticorrosive treating concentrate
Patent number
7,186,354
Issue date
Mar 6, 2007
NEC Electronics Corporation
Hidemitsu Aoki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device having a roughened surface
Patent number
7,170,172
Issue date
Jan 30, 2007
NEC Electronics Corporation
Hiroaki Tomimori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor washing solution and method of producing semiconducto...
Patent number
7,141,121
Issue date
Nov 28, 2006
NEC Electronics Corporation
Hidemitsu Aoki
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Washing liquid composition for semiconductor substrate
Patent number
7,138,362
Issue date
Nov 21, 2006
Kanto Kagaku Kabushiki Kaisha
Yumiko Abe
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Method for manufacturing semiconductor device and semiconductor device
Patent number
7,087,494
Issue date
Aug 8, 2006
NEC Electronics Corporation
Tatsuya Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Post-CMP washing liquid composition
Patent number
7,087,562
Issue date
Aug 8, 2006
Kanto Kagaku Kabushiki Kaisha
Yumiko Abe
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Cleaning method, method for fabricating semiconductor device and cl...
Patent number
6,998,352
Issue date
Feb 14, 2006
NEC Electronics Corporation
Hidemitsu Aoki
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Stripping agent composition and method of stripping
Patent number
6,992,050
Issue date
Jan 31, 2006
NEC Corporation
Tatsuya Koita
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Etching and cleaning methods and etching and cleaning apparatuses u...
Patent number
6,964,724
Issue date
Nov 15, 2005
NEC Corporation
Shinya Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Preparation process for semiconductor device
Patent number
6,949,465
Issue date
Sep 27, 2005
NEC Electronics Corporation
Hidemitsu Aoki
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Semiconductor wafer surface and method of treating a semiconductor...
Patent number
6,897,150
Issue date
May 24, 2005
NEC Electronics Corporation
Hidemitsu Aoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device and apparatus for clea...
Patent number
6,890,391
Issue date
May 10, 2005
NEC Electronics Corporation
Hidemitsu Aoki
B08 - CLEANING
Information
Patent Grant
Semiconductor device fabricating method and treating liquid
Patent number
6,890,864
Issue date
May 10, 2005
NEC Electronics Corporation
Hidemitsu Aoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical solution treatment apparatus for semiconductor substrate
Patent number
6,877,518
Issue date
Apr 12, 2005
NEC Electronics Corporation
Kaori Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ETCHING AND CLEANING METHODS AND ETCHING AND CLEANING APPARATUSES U...
Publication number
20110130010
Publication date
Jun 2, 2011
Renesas Electronics Corporation
Shinya YAMASAKI
B08 - CLEANING
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
Publication number
20080248651
Publication date
Oct 9, 2008
NEC ELECTRONICS CORPORATION
Tatsuya Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Cleaning solution and manufacturing method for semiconductor device
Publication number
20080214002
Publication date
Sep 4, 2008
NEC ELETRONICS CORPORATION
Hidemitsu Aoki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of forming a high-k film on a semiconductor device
Publication number
20080081445
Publication date
Apr 3, 2008
NEC ELECTRONICS CORPORATION
Hiroaki Tomimori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REMOVING SOLUTION, CLEANING METHOD FOR SEMICONDUCTOR SUBSTRATE, AND...
Publication number
20080066779
Publication date
Mar 20, 2008
NEC ELECTRONICS CORPORATION
Hidemitsu Aoki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Process or making a semiconductor device having a roughened surface
Publication number
20070015351
Publication date
Jan 18, 2007
NEC ELECTRONICS CORPORATION
Hiroaki Tomimori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for manufacturing semiconductor device and semiconductor device
Publication number
20060234513
Publication date
Oct 19, 2006
NEC ELECTRONICS CORPORATION
Tatsuya Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus
Publication number
20060081180
Publication date
Apr 20, 2006
Hidemitsu Aoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etching and cleaning methods and etching and cleaning apparatuses u...
Publication number
20050257889
Publication date
Nov 24, 2005
NEC Corporation
Shinya Yamasaki
B08 - CLEANING
Information
Patent Application
Cleaning solution and manufacturing method for semiconductor device
Publication number
20050236362
Publication date
Oct 27, 2005
NEC ELECTRONICS CORPORATION
Hidemitsu Aoki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Tungsten metal removing solution and method for removing tungsten m...
Publication number
20050156140
Publication date
Jul 21, 2005
Kanto Kagaku Kabushiki Kaisha
Toshikazu Shimizu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Manufacturing method of semiconductor device
Publication number
20040266171
Publication date
Dec 30, 2004
NEC Electronics Corporation
Hidemitsu Aoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for manufacturing semiconductor device
Publication number
20040248350
Publication date
Dec 9, 2004
NEC ELECTRONIC CORPORATION
Hiroaki Tomimori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Cleaning solution for semiconductor substrate
Publication number
20040161933
Publication date
Aug 19, 2004
Sumitomo Chemical Company, Limited
Masayuki Takashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device and method for manufacturing same
Publication number
20040130030
Publication date
Jul 8, 2004
NEC Electronics Corporation
Yorinobu Kunimune
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Liquid composition for cleaning hydrophobic substrate and cleaning...
Publication number
20040116315
Publication date
Jun 17, 2004
NEC ELECTRONICS CORPORATION
Hidemitsu Aoki
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
Method for manufacturing semiconductor device and semiconductor device
Publication number
20040082130
Publication date
Apr 29, 2004
NEC ELECTRONIC CORPORATION
Tatsuya Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of manufacturing semiconductor device and apparatus for clea...
Publication number
20040074526
Publication date
Apr 22, 2004
Hidemitsu Aoki
B08 - CLEANING
Information
Patent Application
Etching and cleaning methods and etching and cleaning apparatuses u...
Publication number
20040053508
Publication date
Mar 18, 2004
NEC Corporation
Shinya Yamasaki
B08 - CLEANING
Information
Patent Application
Stripping agent composition and method of stripping
Publication number
20040029051
Publication date
Feb 12, 2004
Tatsuya Koita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Preparation process for semiconductor device
Publication number
20040009658
Publication date
Jan 15, 2004
NEC Electronics Corporation
Hidemitsu Aoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Photoresist residue remover composition
Publication number
20040002020
Publication date
Jan 1, 2004
Takuo Oowada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Post-CMP washing liquid composition
Publication number
20030216270
Publication date
Nov 20, 2003
Yumiko Abe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor washing solution and method of producing semiconducto...
Publication number
20030205241
Publication date
Nov 6, 2003
Hidemitsu Aoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Washing liquid composition for semiconductor substrate
Publication number
20030171233
Publication date
Sep 11, 2003
Yumiko Abe
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
Chemical solution treatment apparatus for semiconductor substrate
Publication number
20030168088
Publication date
Sep 11, 2003
Kaori Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for removing contamination and method for fabricating semico...
Publication number
20030148627
Publication date
Aug 7, 2003
Hidemitsu Aoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Removing solution, cleaning method for semiconductor substrate, and...
Publication number
20030139045
Publication date
Jul 24, 2003
NEC ELECTRONICS CORPORATION
Hidemitsu Aoki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Semiconductor device fabricating method and treating liquid
Publication number
20030134507
Publication date
Jul 17, 2003
NEC Corporation
Hidemitsu Aoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Stripping composition
Publication number
20030130147
Publication date
Jul 10, 2003
NEC CORPORATION, SUMITOMO CHEMICAL COMPANY, LIMITED
Tatsuya Koito
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY