Hidenobu SATO

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Nirasaki City, JP

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Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS
- Publication number 20240347351
- Publication date Oct 17, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Silicon Nitride Film Forming Method and Silicon Nitride Film Formin...
- Publication number 20160276147
- Publication date Sep 22, 2016
- TOKYO ELECTRON LIMITED
- Hidenobu SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROTECTING COMPONENT OF FILM FORMING APPARATUS AND FILM F...
- Publication number 20130251896
- Publication date Sep 26, 2013
- TOKYO ELECTRON LIMITED
- Yamato TONEGAWA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...