Hidenobu Tanimura

Follow

Person

Kudamatsu, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 11,482,435
- Issue date Oct 25, 2022
- HITACHI HIGH-TECH CORPORATION
- Masatoshi Kawakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum chamber
- Patent number 8,532,818
- Issue date Sep 10, 2013
- Hitachi High-Technologies Corporation
- Tomohiro Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus
- Patent number 8,366,370
- Issue date Feb 5, 2013
- Hitachi High-Technologies Corporation
- Tsutomu Nakamura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190393058
- Publication date Dec 26, 2019
- Hitachi High-Technologies Corporation
- Masatoshi Kawakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20150214083
- Publication date Jul 30, 2015
- Hitachi High-Technologies Corporation
- Masatoshi Kawakami
- G01 - MEASURING TESTING
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20120012252
- Publication date Jan 19, 2012
- Hironori Kusumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20110176893
- Publication date Jul 21, 2011
- Tsutomu NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM CHAMBER
- Publication number 20110137454
- Publication date Jun 9, 2011
- Tomohiro OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus
- Publication number 20100186672
- Publication date Jul 29, 2010
- Koji Okuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...