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Hidenori Hanyu
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Kanagawa-ken, JP
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last 30 patents
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Patent Application
FILM FORMING APPARATUS AND GAS-LIQUID SEPARATING APPARATUS
Publication number
20190291040
Publication date
Sep 26, 2019
Kabushiki Kaisha Toshiba
Rempei Nakata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
WAFER HOLDER AND SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20170067162
Publication date
Mar 9, 2017
KABUSHIKI KAISHA TOSHIBA
Takuya Matsuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING...
Publication number
20160273109
Publication date
Sep 22, 2016
Kabushiki Kaisha Toshiba
Yoshiyuki Harada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT
Publication number
20120070966
Publication date
Mar 22, 2012
Kabushiki Kaisha Toshiba
Hiroshi Katsumata
H01 - BASIC ELECTRIC ELEMENTS