Hidenori Ishiwata

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Heater unit for semiconductor processing
- Patent number 6,204,486
- Issue date Mar 20, 2001
- NHK SPRING CO., LTD.
- Takashi Masaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater unit for semiconductor processing
- Patent number 6,180,931
- Issue date Jan 30, 2001
- NHK SPRING CO., LTD.
- Jun Futakuchiya
- H01 - BASIC ELECTRIC ELEMENTS