Hidenori Sato

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Mask manufacturing equipment and mask manufacturing method
- Patent number 9,817,318
- Issue date Nov 14, 2017
- TOSHIBA MEMORY CORPORATION
- Tetsuya Kugimiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positional deviation measuring device, non-transitory computer-read...
- Patent number 9,784,573
- Issue date Oct 10, 2017
- TOSHIBA MEMORY CORPORATION
- Hidenori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask processing apparatus and mask processing method
- Patent number 9,632,407
- Issue date Apr 25, 2017
- Kabushiki Kaisha Yoshiba
- Hidenori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Deflection measuring device and deflection measuring method
- Patent number 9,459,093
- Issue date Oct 4, 2016
- Kabushiki Kaisha Toshiba
- Hidenori Sato
- G01 - MEASURING TESTING
Information Patent Grant
Adjusting method of pattern transferring plate, laser application m...
- Patent number 9,429,849
- Issue date Aug 30, 2016
- Kabushiki Kaisha Toshiba
- Hidenori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection system and method for inspecting line width and/or posit...
- Patent number 9,406,117
- Issue date Aug 2, 2016
- NuFlare Technology, Inc.
- Takanao Touya
- G01 - MEASURING TESTING
Information Patent Grant
Overlay displacement amount measuring method, positional displaceme...
- Patent number 9,354,527
- Issue date May 31, 2016
- Kabushiki Kaisha Toshiba
- Hidenori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and transfer characteristics measuring method
- Patent number 9,239,526
- Issue date Jan 19, 2016
- Kabushiki Kaisha Toshiba
- Hidenori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection system and method for inspecting line width and/or posit...
- Patent number 9,036,896
- Issue date May 19, 2015
- Nuflare Technology, Inc.
- Takanao Touya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Photomask and method for manufacturing the same
- Patent number 8,778,570
- Issue date Jul 15, 2014
- Kabushiki Kaisha Toshiba
- Kentaro Okuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DETERMINATION DEVICE, DETERMINATION SYSTEM, DETERMINATION METHOD, P...
- Publication number 20240404039
- Publication date Dec 5, 2024
- Kabushiki Kaisha Toshiba
- Yusuke HIROSE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION DEVICE AND WELDING DEVICE
- Publication number 20210291303
- Publication date Sep 23, 2021
- Kabushiki Kaisha Toshiba
- Chinatsu MORI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
POSITIONAL DEVIATION MEASURING DEVICE, NON-TRANSITORY COMPUTER-READ...
- Publication number 20160245645
- Publication date Aug 25, 2016
- KABUSHIKI KAISHA TOSHIBA
- Hidenori SATO
- G01 - MEASURING TESTING
Information Patent Application
MASK PROCESSING APPARATUS, MASK PROCESSING METHOD AND RECORDING MEDIUM
- Publication number 20160018730
- Publication date Jan 21, 2016
- KABUSHIKI KAISHA TOSHIBA
- Hidenori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK MANUFACTURING EQUIPMENT AND MASK MANUFACTURING METHOD
- Publication number 20150268562
- Publication date Sep 24, 2015
- KABUSHIKI KAISHA TOSHIBA
- Tetsuya KUGIMIYA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ADJUSTING METHOD OF PATTERN TRANSFERRING PLATE, LASER APPLICATION M...
- Publication number 20150253676
- Publication date Sep 10, 2015
- KABUSHIKI KAISHA TOSHIBA
- Hidenori SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEFLECTION MEASURING DEVICE AND DEFLECTION MEASURING METHOD
- Publication number 20150233706
- Publication date Aug 20, 2015
- KABUSHIKI KAISHA TOSHIBA
- Hidenori SATO
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM AND METHOD FOR INSPECTING LINE WIDTH AND/OR POSIT...
- Publication number 20150193918
- Publication date Jul 9, 2015
- NuFlare Technology, Inc.
- Takanao Touya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OVERLAY DISPLACEMENT AMOUNT MEASURING METHOD, POSITIONAL DISPLACEME...
- Publication number 20150036717
- Publication date Feb 5, 2015
- KABUSHIKI KAISHA TOSHIBA
- Hidenori SATO
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS AND TRANSFER CHARACTERISTICS MEASURING METHOD
- Publication number 20150022791
- Publication date Jan 22, 2015
- KABUSHIKI KAISHA TOSHIBA
- Hidenori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TEMPLATE, MANUFACTURING METHOD OF THE TEMPLATE, AND STRAIN MEASURIN...
- Publication number 20140209567
- Publication date Jul 31, 2014
- Hidenori SATO
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
TEMPLATE, MANUFACTURING METHOD OF THE TEMPLATE, AND POSITION MEASUR...
- Publication number 20140205702
- Publication date Jul 24, 2014
- Kabushiki Kaisha Toshiba
- Hidenori SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOMASK AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20120225374
- Publication date Sep 6, 2012
- Kabushiki Kaisha Toshiba
- Kentaro OKUDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INSPECTION SYSTEM AND METHOD FOR INSPECTING LINE WIDTH AND/OR POSIT...
- Publication number 20110255770
- Publication date Oct 20, 2011
- Kabushiki Kaisha Toshiba
- Takanao Touya
- G06 - COMPUTING CALCULATING COUNTING

Hidenori Sato

Person

Patents Grantslast 30 patents

Mask manufacturing equipment and mask manufacturing method

Positional deviation measuring device, non-transitory computer-read...

Mask processing apparatus and mask processing method

Deflection measuring device and deflection measuring method

Adjusting method of pattern transferring plate, laser application m...

Inspection system and method for inspecting line width and/or posit...

Overlay displacement amount measuring method, positional displaceme...

Exposure apparatus and transfer characteristics measuring method

Inspection system and method for inspecting line width and/or posit...

Photomask and method for manufacturing the same

Patents Applicationslast 30 patents

DETERMINATION DEVICE, DETERMINATION SYSTEM, DETERMINATION METHOD, P...

INSPECTION DEVICE AND WELDING DEVICE

POSITIONAL DEVIATION MEASURING DEVICE, NON-TRANSITORY COMPUTER-READ...

MASK PROCESSING APPARATUS, MASK PROCESSING METHOD AND RECORDING MEDIUM

MASK MANUFACTURING EQUIPMENT AND MASK MANUFACTURING METHOD

ADJUSTING METHOD OF PATTERN TRANSFERRING PLATE, LASER APPLICATION M...

DEFLECTION MEASURING DEVICE AND DEFLECTION MEASURING METHOD

INSPECTION SYSTEM AND METHOD FOR INSPECTING LINE WIDTH AND/OR POSIT...

OVERLAY DISPLACEMENT AMOUNT MEASURING METHOD, POSITIONAL DISPLACEME...

EXPOSURE APPARATUS AND TRANSFER CHARACTERISTICS MEASURING METHOD

TEMPLATE, MANUFACTURING METHOD OF THE TEMPLATE, AND STRAIN MEASURIN...

TEMPLATE, MANUFACTURING METHOD OF THE TEMPLATE, AND POSITION MEASUR...

PHOTOMASK AND METHOD FOR MANUFACTURING THE SAME

INSPECTION SYSTEM AND METHOD FOR INSPECTING LINE WIDTH AND/OR POSIT...