Hideo ETO

Person

Kanagawa-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Bonding apparatus and bonding method
- Patent number 11,482,443
- Issue date Oct 25, 2022
- Kioxia Corporation
- Hideo Eto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate supporting device and plasma processing apparatus
- Patent number 11,094,574
- Issue date Aug 17, 2021
- TOSHIBA MEMORY CORPORATION
- Hideo Eto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing-apparatus processing object support platform, pla...
- Patent number 10,818,535
- Issue date Oct 27, 2020
- TOSHIBA MEMORY CORPORATION
- Hideo Eto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon carbide member for plasma processing apparatus
- Patent number 10,280,121
- Issue date May 7, 2019
- HOKURIKU SEIKEI INDUSTRIAL CO., LTD.
- Masahiro Okesaku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and control method of substrate proc...
- Patent number 10,115,615
- Issue date Oct 30, 2018
- TOSHIBA MEMORY CORPORATION
- Hideo Eto
- B08 - CLEANING
Information Patent Grant
Electrostatic chuck, mount plate support, and manufacturing method...
- Patent number 9,370,920
- Issue date Jun 21, 2016
- Kabushiki Kaisha Toshiba
- Hideo Eto
- B32 - LAYERED PRODUCTS
Information Patent Grant
Electrostatic chuck, mount plate support, and manufacturing method...
- Patent number 9,248,635
- Issue date Feb 2, 2016
- Kabushiki Kaisha Toshiba
- Hideo Eto
- B32 - LAYERED PRODUCTS
Information Patent Grant
Gas supply member, plasma treatment method, and method of forming y...
- Patent number 9,236,229
- Issue date Jan 12, 2016
- Kabushiki Kaisha Toshiba
- Hideo Eto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Seal member, etching apparatus, and a method of manufacturing a sem...
- Patent number 9,111,969
- Issue date Aug 18, 2015
- Kabushiki Kaisha Toshiba
- Hideo Eto
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Pressure controlling apparatus
- Patent number 8,833,388
- Issue date Sep 16, 2014
- Kabushiki Kaisha Toshiba
- Hideo Eto
- G05 - CONTROLLING REGULATING
Information Patent Grant
Power supply control device, plasma processing device, and plasma p...
- Patent number 8,760,053
- Issue date Jun 24, 2014
- Kabushiki Kaisha Toshiba
- Hideo Eto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flow sensor, mass flow controller, and method for manufacturing flo...
- Patent number 8,689,623
- Issue date Apr 8, 2014
- Kabushiki Kaisha Toshiba
- Hideo Eto
- G05 - CONTROLLING REGULATING
Information Patent Grant
Mass flow controller, mass flow controller system, substrate proces...
- Patent number 8,651,135
- Issue date Feb 18, 2014
- Kabushiki Kaisha Toshiba
- Hideo Eto
- G05 - CONTROLLING REGULATING
Information Patent Grant
Optical biosensor
- Patent number 7,678,567
- Issue date Mar 16, 2010
- Kabushiki Kaisha Toshiba
- Ikuo Uematsu
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Concentration measuring method, concentration measuring kit, and se...
- Patent number 7,498,145
- Issue date Mar 3, 2009
- Kabushiki Kaisha Toshiba
- Kenichi Uchiyama
- G01 - MEASURING TESTING
Information Patent Grant
Optical waveguide type iontophoresis sensor chip and method for pac...
- Patent number 7,410,614
- Issue date Aug 12, 2008
- Kabushiki Kaisha Toshiba
- Kenichi Uchiyama
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Optical waveguide sensor, device, system and method for glucose mea...
- Patent number 7,054,514
- Issue date May 30, 2006
- Kabushiki Kaisha Toshiba
- Kenichi Uchiyama
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Optical waveguide sensor, device, system and method for glucose mea...
- Patent number 6,903,815
- Issue date Jun 7, 2005
- Kabushiki Kaisha Toshiba
- Kenichi Uchiyama
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Ink jet head having a nozzle plate
- Patent number 6,767,078
- Issue date Jul 27, 2004
- Kabushiki Kaisha Toshiba
- Akira Sato
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS

Patents Applicationslast 30 patents

Information Patent Application
BONDING APPARATUS AND BONDING METHOD
- Publication number 20210287926
- Publication date Sep 16, 2021
- KIOXIA Corporation
- Hideo ETO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTING DEVICE AND PLASMA PROCESSING APPARATUS
- Publication number 20200035536
- Publication date Jan 30, 2020
- Toshiba Memory Corporation
- Hideo ETO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING-APPARATUS PROCESSING OBJECT SUPPORT PLATFORM, PLA...
- Publication number 20190096731
- Publication date Mar 28, 2019
- Toshiba Memory Corporation
- Hideo ETO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSING SYSTEM, SENSING WAFER, AND PLASMA PROCESSING APPARATUS
- Publication number 20180261481
- Publication date Sep 13, 2018
- Toshiba Memory Corporation
- Hideo ETO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON CARBIDE MEMBER FOR PLASMA PROCESSING APPARATUS, AND PRODUCT...
- Publication number 20180072629
- Publication date Mar 15, 2018
- HOKURIKU SEIKEI INDUSTRIAL CO., LTD.
- Masahiro OKESAKU
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
PLASMA PROCESSING-APPARATUS PROCESSING OBJECT SUPPORT PLATFORM, PLA...
- Publication number 20180012784
- Publication date Jan 11, 2018
- Toshiba Memory Corporation
- Hideo ETO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD OF SUBSTRATE PROC...
- Publication number 20170263477
- Publication date Sep 14, 2017
- KABUSHIKI KAISHA TOSHIBA
- Hideo ETO
- B08 - CLEANING
Information Patent Application
UPPER ELECTRODE, EDGE RING, AND PLASMA PROCESSING APPARATUS
- Publication number 20160284522
- Publication date Sep 29, 2016
- KABUSHIKI KAISHA TOSHIBA
- Hideo ETO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD
- Publication number 20150143146
- Publication date May 21, 2015
- KABUSHIKI KAISHA TOSHIBA
- Hideo ETO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ELECTROSTATIC CHUCK, MOUNT PLATE SUPPORT, AND MANUFACTURING METHOD...
- Publication number 20150043122
- Publication date Feb 12, 2015
- KABUSHIKI KAISHA TOSHIBA
- Hideo ETO
- B32 - LAYERED PRODUCTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20140231018
- Publication date Aug 21, 2014
- KABUSHIKI KAISHA TOSHIBA
- Yoshifumi AOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SUPPLY MEMBER, PLASMA PROCESSING APPARATUS AND METHOD OF FABRIC...
- Publication number 20140231251
- Publication date Aug 21, 2014
- KABUSHIKI KAISHA TOSHIBA
- Hisashi Hashiguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODE FOR PLASMA PROCESSING APPARATUS, METHOD FOR MANUFACTURING...
- Publication number 20140217891
- Publication date Aug 7, 2014
- KABUSHIKI KAISHA TOSHIBA
- Hideo ETO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEAL MEMBER, ETCHING APPARATUS, AND A METHOD OF MANUFACTURING A SEM...
- Publication number 20130330929
- Publication date Dec 12, 2013
- Kabushiki Kaisha Toshiba
- Hideo ETO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING DEVICE AND FOCUS RING
- Publication number 20130168020
- Publication date Jul 4, 2013
- Kabushiki Kaisha Toshiba
- Hisashi HASHIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOW SENSOR, MASS FLOW CONTROLLER, AND METHOD FOR MANUFACTURING FLO...
- Publication number 20130074593
- Publication date Mar 28, 2013
- Kabushiki Kaisha Toshiba
- Hideo ETO
- G01 - MEASURING TESTING
Information Patent Application
COAXIAL CABLE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20130008603
- Publication date Jan 10, 2013
- Kabushiki Kaisha Toshiba
- Hideo Eto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA TREATMENT APPARATUS
- Publication number 20120247667
- Publication date Oct 4, 2012
- Kabushiki Kaisha Toshiba
- Hisashi HASHIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRESSURE CONTROLLING APPARATUS
- Publication number 20120227830
- Publication date Sep 13, 2012
- Kabushiki Kaisha Toshiba
- Hideo Eto
- G05 - CONTROLLING REGULATING
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20120216955
- Publication date Aug 30, 2012
- TOSHIBA MATERIALS CO., LTD.
- Hideo ETO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROTECTIVE FILM, METHOD FOR FORMING THE SAME, SEMICONDUCTOR MANUFAC...
- Publication number 20120040132
- Publication date Feb 16, 2012
- Kabushiki Kaisha Toshiba
- Hideo ETO
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
GAS SUPPLY MEMBER, PLASMA TREATMENT METHOD, AND METHOD OF FORMING Y...
- Publication number 20120037596
- Publication date Feb 16, 2012
- Hideo ETO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POWER SUPPLY CONTROL DEVICE, PLASMA PROCESSING DEVICE, AND PLASMA P...
- Publication number 20120038277
- Publication date Feb 16, 2012
- Hideo ETO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA TREATMENT APPARATUS AND PLASMA TREATMENT METHOD
- Publication number 20120000887
- Publication date Jan 5, 2012
- Kabushiki Kaisha Toshiba
- Hideo Eto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASS FLOW CONTROL SYSTEM, PLASMA PROCESSING APPARATUS, AND FLOW CON...
- Publication number 20120000607
- Publication date Jan 5, 2012
- Kabushiki Kaisha Toshiba
- Atsushi Ito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASS FLOW CONTROLLER, MASS FLOW CONTROLLER SYSTEM, SUBSTRATE PROCES...
- Publication number 20120000542
- Publication date Jan 5, 2012
- Kabushiki Kaisha Toshiba
- Hideo ETO
- G05 - CONTROLLING REGULATING
Information Patent Application
MACHINING ELECTRODE, ELECTROCHEMICAL MACHINING APPARATUS, ELECTROCH...
- Publication number 20100051475
- Publication date Mar 4, 2010
- Kabushiki Kaisha Toshiba
- Hideo ETO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Concentration measuring method, concentration measuring kit, and se...
- Publication number 20060194345
- Publication date Aug 31, 2006
- Kabushiki Kaisha Toshiba
- Kenichi Uchiyama
- G01 - MEASURING TESTING
Information Patent Application
Optical waveguide type iontophoresis sensor chip and method for pac...
- Publication number 20060063984
- Publication date Mar 23, 2006
- Kenichi Uchiyama
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Optical biosensor
- Publication number 20060019374
- Publication date Jan 26, 2006
- Ikuo Uematsu
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...

Person

Patents Grantslast 30 patents

Bonding apparatus and bonding method

Substrate supporting device and plasma processing apparatus

Plasma processing-apparatus processing object support platform, pla...

Silicon carbide member for plasma processing apparatus

Substrate processing apparatus and control method of substrate proc...

Electrostatic chuck, mount plate support, and manufacturing method...

Electrostatic chuck, mount plate support, and manufacturing method...

Gas supply member, plasma treatment method, and method of forming y...

Seal member, etching apparatus, and a method of manufacturing a sem...

Pressure controlling apparatus

Power supply control device, plasma processing device, and plasma p...

Flow sensor, mass flow controller, and method for manufacturing flo...

Mass flow controller, mass flow controller system, substrate proces...

Optical biosensor

Concentration measuring method, concentration measuring kit, and se...

Optical waveguide type iontophoresis sensor chip and method for pac...

Optical waveguide sensor, device, system and method for glucose mea...

Optical waveguide sensor, device, system and method for glucose mea...

Ink jet head having a nozzle plate

Patents Applicationslast 30 patents

BONDING APPARATUS AND BONDING METHOD

SUBSTRATE SUPPORTING DEVICE AND PLASMA PROCESSING APPARATUS

PLASMA PROCESSING-APPARATUS PROCESSING OBJECT SUPPORT PLATFORM, PLA...

SENSING SYSTEM, SENSING WAFER, AND PLASMA PROCESSING APPARATUS

SILICON CARBIDE MEMBER FOR PLASMA PROCESSING APPARATUS, AND PRODUCT...

PLASMA PROCESSING-APPARATUS PROCESSING OBJECT SUPPORT PLATFORM, PLA...

SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD OF SUBSTRATE PROC...

UPPER ELECTRODE, EDGE RING, AND PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD

ELECTROSTATIC CHUCK, MOUNT PLATE SUPPORT, AND MANUFACTURING METHOD...

PLASMA PROCESSING APPARATUS

GAS SUPPLY MEMBER, PLASMA PROCESSING APPARATUS AND METHOD OF FABRIC...

ELECTRODE FOR PLASMA PROCESSING APPARATUS, METHOD FOR MANUFACTURING...

SEAL MEMBER, ETCHING APPARATUS, AND A METHOD OF MANUFACTURING A SEM...

ETCHING DEVICE AND FOCUS RING

FLOW SENSOR, MASS FLOW CONTROLLER, AND METHOD FOR MANUFACTURING FLO...

COAXIAL CABLE AND SUBSTRATE PROCESSING APPARATUS

PLASMA TREATMENT APPARATUS

PRESSURE CONTROLLING APPARATUS

PLASMA PROCESSING APPARATUS

PROTECTIVE FILM, METHOD FOR FORMING THE SAME, SEMICONDUCTOR MANUFAC...

GAS SUPPLY MEMBER, PLASMA TREATMENT METHOD, AND METHOD OF FORMING Y...

POWER SUPPLY CONTROL DEVICE, PLASMA PROCESSING DEVICE, AND PLASMA P...

PLASMA TREATMENT APPARATUS AND PLASMA TREATMENT METHOD

MASS FLOW CONTROL SYSTEM, PLASMA PROCESSING APPARATUS, AND FLOW CON...

MASS FLOW CONTROLLER, MASS FLOW CONTROLLER SYSTEM, SUBSTRATE PROCES...

MACHINING ELECTRODE, ELECTROCHEMICAL MACHINING APPARATUS, ELECTROCH...

Concentration measuring method, concentration measuring kit, and se...

Optical waveguide type iontophoresis sensor chip and method for pac...

Optical biosensor