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Hideo Hoshino
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Tochigi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Laser annealing apparatus and method for manufacturing electronic d...
Patent number
12,109,648
Issue date
Oct 8, 2024
Gigaphoton Inc.
Satoshi Tanaka
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Filter and target supply apparatus
Patent number
10,143,074
Issue date
Nov 27, 2018
Gigaphoton Inc.
Tomohide Ichinose
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Target image-capture device, extreme-ultraviolet-light generation d...
Patent number
10,141,186
Issue date
Nov 27, 2018
Gigaphoton Inc.
Hirokazu Hosoda
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser apparatus and extreme ultraviolet light generation system
Patent number
10,122,145
Issue date
Nov 6, 2018
Gigaphoton Inc.
Yoshiaki Kurosawa
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser apparatus and laser apparatus manufacturing method
Patent number
9,837,779
Issue date
Dec 5, 2017
Gigaphoton Inc.
Yasufumi Kawasuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser amplifier, laser apparatus, and extreme ultraviolet light gen...
Patent number
9,685,756
Issue date
Jun 20, 2017
Gigaphoton Inc.
Takashi Suganuma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical device, laser apparatus, and extreme ultraviolet light gene...
Patent number
9,362,703
Issue date
Jun 7, 2016
Gigaphoton Inc.
Hakaru Mizoguchi
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser beam output control with optical shutter
Patent number
9,318,864
Issue date
Apr 19, 2016
Gigaphoton Inc.
Krzysztof Nowak
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Wavelength converter, wavelength converting device, solid state las...
Patent number
8,934,510
Issue date
Jan 13, 2015
Gigaphoton Inc.
Kouji Kakizaki
G02 - OPTICS
Information
Patent Grant
Optical device, laser apparatus, and extreme ultraviolet light gene...
Patent number
8,891,161
Issue date
Nov 18, 2014
Gigaphoton Inc.
Hakaru Mizoguchi
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser apparatus, extreme ultraviolet light generation system, and m...
Patent number
8,885,680
Issue date
Nov 11, 2014
Gigaphoton Inc.
Hiroaki Nakarai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser device with optical element module on separate plate
Patent number
8,817,838
Issue date
Aug 26, 2014
Gigaphoton Inc.
Tamotsu Abe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Temperature controller for gas laser
Patent number
8,811,438
Issue date
Aug 19, 2014
Gigaphoton Inc.
Yukio Watanabe
F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information
Patent Grant
Collector mirror exchanging apparatus and method for extreme ultrav...
Patent number
8,804,902
Issue date
Aug 12, 2014
Gigaphoton Inc.
Hiroshi Someya
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Temperature controller for gas laser
Patent number
8,787,413
Issue date
Jul 22, 2014
Gigaphoton Inc.
Yukio Watanabe
F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information
Patent Grant
Target supply device, extreme ultraviolet light generation apparatu...
Patent number
8,742,380
Issue date
Jun 3, 2014
Gigaphoton Inc.
Tsukasa Hori
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Target output device and extreme ultraviolet light source apparatus
Patent number
8,710,472
Issue date
Apr 29, 2014
Gigaphoton Inc.
Takanobu Ishihara
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source device, laser light source device...
Patent number
8,698,114
Issue date
Apr 15, 2014
Gigaphoton Inc.
Masato Moriya
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generation system
Patent number
8,698,111
Issue date
Apr 15, 2014
Gigaphonton Inc.
Toshihiro Nishisaka
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,558,202
Issue date
Oct 15, 2013
Gigaphoton Inc.
Tatsuya Yanagida
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for cleaning collector mirror in EUV light gen...
Patent number
8,536,550
Issue date
Sep 17, 2013
Gigaphoton Inc.
Takeshi Asayama
B08 - CLEANING
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,507,883
Issue date
Aug 13, 2013
Gigaphoton Inc.
Akira Endo
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Temperature controller for gas laser
Patent number
8,498,317
Issue date
Jul 30, 2013
Gigaphoton Inc.
Yukio Watanabe
F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information
Patent Grant
Apparatus for and method of withdrawing ions in EUV light productio...
Patent number
8,492,738
Issue date
Jul 23, 2013
Gigaphoton, Inc.
Yoshifumi Ueno
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Collector mirror exchanging apparatus and method for extreme ultrav...
Patent number
8,477,412
Issue date
Jul 2, 2013
Gigaphoton Inc.
Hiroshi Someya
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Extreme ultraviolet light source device, laser light source device...
Patent number
8,476,609
Issue date
Jul 2, 2013
Gigaphoton Inc.
Akira Endo
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source apparatus and target supply device
Patent number
8,445,877
Issue date
May 21, 2013
Gigaphoton Inc.
Hiroshi Someya
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,436,328
Issue date
May 7, 2013
Gigaphoton Inc.
Tatsuya Yanagida
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus and method of adjusting a laser light source for an EUV s...
Patent number
8,395,133
Issue date
Mar 12, 2013
Gigaphoton Inc.
Masato Moriya
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultra violet light source apparatus
Patent number
8,324,601
Issue date
Dec 4, 2012
Gigaphoton Inc.
Hideo Hoshino
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LASER ANNEALING APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC D...
Publication number
20220009031
Publication date
Jan 13, 2022
Gigaphoton Inc.
Satoshi TANAKA
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
TARGET IMAGE-CAPTURE DEVICE, EXTREME-ULTRAVIOLET-LIGHT GENERATION D...
Publication number
20170358442
Publication date
Dec 14, 2017
Gigaphoton Inc.
Hirokazu HOSODA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Publication number
20170317464
Publication date
Nov 2, 2017
Gigaphoton Inc.
Yoshiaki KUROSAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND EXTREME ULTRAVIOLET...
Publication number
20170127505
Publication date
May 4, 2017
Institute for Laser Technology
Atsushi SUNAHARA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LASER APPARATUS AND LASER APPARATUS MANUFACTURING METHOD
Publication number
20160365694
Publication date
Dec 15, 2016
GIGAPHOTON INC.
Yasufumi KAWASUJI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILTER AND TARGET SUPPLY APPARATUS
Publication number
20160227637
Publication date
Aug 4, 2016
Gigaphoton Inc.
Tomohide ICHINOSE
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LASER AMPLIFIER, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GEN...
Publication number
20160172820
Publication date
Jun 16, 2016
Gigaphoton Inc.
Takashi SUGANUMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENE...
Publication number
20140374605
Publication date
Dec 25, 2014
Hakaru MIZOGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR CLEANING COLLECTOR MIRROR IN EUV LIGHT GEN...
Publication number
20140166046
Publication date
Jun 19, 2014
GIGAPHOTON INC.
Takeshi Asayama
B08 - CLEANING
Information
Patent Application
TEMPERATURE CONTROLLER FOR GAS LASER
Publication number
20130294470
Publication date
Nov 7, 2013
Yukio Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROLLER FOR GAS LASER
Publication number
20130294469
Publication date
Nov 7, 2013
Yukio Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COLLECTOR MIRROR EXCHANGING APPARATUS AND METHOD FOR EXTREME ULTRAV...
Publication number
20130221247
Publication date
Aug 29, 2013
GIGAPHOTON INC.
Hiroshi Someya
B82 - NANO-TECHNOLOGY
Information
Patent Application
TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATU...
Publication number
20130221246
Publication date
Aug 29, 2013
GIGAPHOTON INC.
Tsukasa HORI
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
OPTICAL DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENE...
Publication number
20130208742
Publication date
Aug 15, 2013
GIGAPHOTON INC.
Hakaru Mizoguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAVELENGTH CONVERTER, WAVELENGTH CONVERTING DEVICE, SOLID STATE LAS...
Publication number
20130202003
Publication date
Aug 8, 2013
Gigaphoton Inc.
Kouji KAKIZAKI
G02 - OPTICS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE, LASER LIGHT SOURCE DEVICE...
Publication number
20130148677
Publication date
Jun 13, 2013
GIGAPHOTON INC.
Masato Moriya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER APPARATUS, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND M...
Publication number
20130099140
Publication date
Apr 25, 2013
GIGAPHOTON INC.
Hiroaki Nakarai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM INC...
Publication number
20130032735
Publication date
Feb 7, 2013
Gigaphoton Inc.
Krzysztof Nowak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROLLER FOR GAS LASER
Publication number
20120267343
Publication date
Oct 25, 2012
Gigaphoton Inc.
Yukio WATANABE
F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information
Patent Application
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
Publication number
20120228527
Publication date
Sep 13, 2012
Komatsu Ltd./Gigaphoton, Inc.
Tamotsu ABE
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
APPARATUS FOR AND METHOD OF WITHDRAWING IONS IN EUV LIGHT PRODUCTIO...
Publication number
20120217414
Publication date
Aug 30, 2012
GIGAPHOTON INC.
Yoshifumi UENO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM
Publication number
20120119118
Publication date
May 17, 2012
GIGAPHOTON INC.
Yukio WATANABE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Publication number
20120104290
Publication date
May 3, 2012
Toshihiro Nishisaka
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
Publication number
20120091893
Publication date
Apr 19, 2012
Gigaphoton, Inc
Tatsuya YANAGIDA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE, LASER LIGHT SOURCE DEVICE...
Publication number
20120068091
Publication date
Mar 22, 2012
GIGAPHOTON INC.
Akira Endo
G02 - OPTICS
Information
Patent Application
TARGET OUTPUT DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
Publication number
20110284774
Publication date
Nov 24, 2011
GIGAPHOTON INC.
Takanobu ISHIHARA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LASER SYSTEM
Publication number
20110261844
Publication date
Oct 27, 2011
GIGAPHOTON INC.
Tamotsu ABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRIVER LASER FOR EXTREME ULTRA VIOLET LIGHT SOURCE DEVICE
Publication number
20110211601
Publication date
Sep 1, 2011
Tatsuya Ariga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS AND NOZZLE PROTECTION DE...
Publication number
20110174996
Publication date
Jul 21, 2011
Gigaphoton, Inc
Hiroshi SOMEYA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
Publication number
20110057126
Publication date
Mar 10, 2011
Hideo Hoshino
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY