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Hideo Ida
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Oume, JP
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last 30 patents
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Patent Grant
Plasma processing apparatus utilizing a microwave window having a t...
Patent number
6,091,045
Issue date
Jul 18, 2000
Sumitomo Metal Industries, Inc.
Hiroshi Mabuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
5,951,887
Issue date
Sep 14, 1999
Sumitomo Metal Industries, Ltd.
Hiroshi Mabuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...