Hideo Inoue

Person

Numazu, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Multiple charged particle beam writing method and apparatus using b...
- Patent number 10,978,273
- Issue date Apr 13, 2021
- NuFlare Technology, Inc.
- Hideo Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 10,796,882
- Issue date Oct 6, 2020
- NuFlare Technology, Inc.
- Ryoichi Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple charged particle beam writing apparatus, and multiple char...
- Patent number 10,784,080
- Issue date Sep 22, 2020
- NuFlare Technology, Inc.
- Ryoichi Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple charged particle beam writing apparatus, and multiple char...
- Patent number 10,607,812
- Issue date Mar 31, 2020
- NuFlare Technology, Inc.
- Hideo Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number RE47922
- Issue date Mar 31, 2020
- NuFlare Technology, Inc.
- Hideo Inoue
Information Patent Grant
Drawing device and drawing method
- Patent number 10,475,621
- Issue date Nov 12, 2019
- NuFlare Technology, Inc.
- Kei Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi charged particle beam writing apparatus, and multi charged pa...
- Patent number 10,134,562
- Issue date Nov 20, 2018
- NuFlare Technology, Inc.
- Yasuo Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing method and multi charged partic...
- Patent number 10,020,159
- Issue date Jul 10, 2018
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-charged particle beam writing apparatus and multi-charged par...
- Patent number 9,953,800
- Issue date Apr 24, 2018
- NuFlare Technology, Inc.
- Kei Hasegawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
- Patent number 9,934,935
- Issue date Apr 3, 2018
- NuFlare Technology, Inc.
- Ryoichi Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
- Patent number 9,852,876
- Issue date Dec 26, 2017
- NuFlare Technology, Inc.
- Yasuo Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing apparatus, and multi charged pa...
- Patent number 9,715,993
- Issue date Jul 25, 2017
- NuFlare Technology, Inc.
- Hideo Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing apparatus, and multi charged pa...
- Patent number 9,679,748
- Issue date Jun 13, 2017
- NuFlare Technology, Inc.
- Hideo Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing method and multi charged partic...
- Patent number 9,570,267
- Issue date Feb 14, 2017
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shot data generation method and multi charged particle beam writing...
- Patent number 9,514,914
- Issue date Dec 6, 2016
- NuFlare Technology, Inc.
- Hideo Inoue
- G11 - INFORMATION STORAGE
Information Patent Grant
Charged particle beam writing apparatus, and method for detecting i...
- Patent number 9,269,532
- Issue date Feb 23, 2016
- NUFLARE TECHNOLOGY, INC.
- Hironori Mizoguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing method and multi charged partic...
- Patent number 9,202,673
- Issue date Dec 1, 2015
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 8,779,394
- Issue date Jul 15, 2014
- Nuflare Technology, Inc.
- Hideo Inoue
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam pattern forming apparatus and charged particl...
- Patent number 8,502,175
- Issue date Aug 6, 2013
- Nuflare Technology, Inc.
- Noriaki Nakayamada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 8,431,908
- Issue date Apr 30, 2013
- Nuflare Technology, Inc.
- Hideo Inoue
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Tracking control method and electron beam writing system
- Patent number 7,923,699
- Issue date Apr 12, 2011
- Nuflare Technology, Inc.
- Hideo Inoue
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Data transfer system
- Patent number 7,899,953
- Issue date Mar 1, 2011
- Nuflare Technology, Inc.
- Hideo Inoue
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Lithography system and lithography method using the same
- Patent number 7,741,614
- Issue date Jun 22, 2010
- Nuflare Technology, Inc.
- Hideo Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern writing method
- Patent number 6,346,354
- Issue date Feb 12, 2002
- Kabushiki Kaisha Toshiba
- Takayuki Abe
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTIPLE CHAR...
- Publication number 20190304749
- Publication date Oct 3, 2019
- NuFlare Technology, Inc.
- Ryoichi Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20190304748
- Publication date Oct 3, 2019
- NuFlare Technology, Inc.
- Ryoichi Yoshikawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTIPLE CHARGED PARTICLE BEAM WRITING METHOD, AND MULTIPLE CHARGED...
- Publication number 20190198294
- Publication date Jun 27, 2019
- NuFlare Technology, Inc.
- Hideo INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTIPLE CHAR...
- Publication number 20190198290
- Publication date Jun 27, 2019
- NuFlare Technology, Inc.
- Hideo INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRAWING DEVICE AND DRAWING METHOD
- Publication number 20180350560
- Publication date Dec 6, 2018
- NuFlare Technology, Inc.
- Kei HASEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...
- Publication number 20180261421
- Publication date Sep 13, 2018
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
- Publication number 20170229280
- Publication date Aug 10, 2017
- NuFlare Technology, Inc.
- Yasuo KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...
- Publication number 20170098524
- Publication date Apr 6, 2017
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
- Publication number 20170047194
- Publication date Feb 16, 2017
- NuFlare Technology, Inc.
- Ryoichi YOSHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI-CHARGED PAR...
- Publication number 20160322196
- Publication date Nov 3, 2016
- NuFlare Technology, Inc.
- Kei HASEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI CHARGED PA...
- Publication number 20160284513
- Publication date Sep 29, 2016
- NuFlare Technology, Inc.
- Hideo INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI CHARGED PA...
- Publication number 20160181062
- Publication date Jun 23, 2016
- NuFlare Technology, Inc.
- Yasuo KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI CHARGED PA...
- Publication number 20160155608
- Publication date Jun 2, 2016
- NuFlare Technology, Inc.
- Hideo INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...
- Publication number 20160042908
- Publication date Feb 11, 2016
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, AND METHOD FOR DETECTING I...
- Publication number 20150325407
- Publication date Nov 12, 2015
- NuFlare Technology, Inc.
- Hironori MIZOGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOT DATA GENERATION METHOD AND MULTI CHARGED PARTICLE BEAM WRITING...
- Publication number 20150294836
- Publication date Oct 15, 2015
- NuFlare Technology, Inc.
- Hideo INOUE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...
- Publication number 20140124684
- Publication date May 8, 2014
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20120248340
- Publication date Oct 4, 2012
- NuFlare Technology, Inc.
- Hideo INOUE
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20120187307
- Publication date Jul 26, 2012
- NuFlare Technology, Inc.
- Hideo INOUE
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM PATTERN FORMING APPARATUS AND CHARGED PARTICL...
- Publication number 20120007002
- Publication date Jan 12, 2012
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- B82 - NANO-TECHNOLOGY
Information Patent Application
TRACKING CONTROL METHOD AND ELECTRON BEAM WRITING SYSTEM
- Publication number 20090134343
- Publication date May 28, 2009
- NuFlare Technology, Inc.
- Hideo INOUE
- B82 - NANO-TECHNOLOGY
Information Patent Application
DATA TRANSFER SYSTEM
- Publication number 20080263236
- Publication date Oct 23, 2008
- NuFlare Technology, Inc.
- Hideo INOUE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LITHOGRAPHY SYSTEM AND LITHOGRAPHY METHOD USING THE SAME
- Publication number 20080006778
- Publication date Jan 10, 2008
- NuFlare Technology, Inc.
- Hideo INOUE
- B82 - NANO-TECHNOLOGY
Information Patent Application
LITHOGRAPHY SYSTEM AND ERROR DETECTION METHOD IN SAME
- Publication number 20080006777
- Publication date Jan 10, 2008
- NuFlare Technology, Inc.
- Hideo INOUE
- B82 - NANO-TECHNOLOGY

Hideo Inoue

Person

Patents Grantslast 30 patents

Multiple charged particle beam writing method and apparatus using b...

Charged particle beam writing apparatus and charged particle beam w...

Multiple charged particle beam writing apparatus, and multiple char...

Multiple charged particle beam writing apparatus, and multiple char...

Charged particle beam writing apparatus and charged particle beam w...

Drawing device and drawing method

Multi charged particle beam writing apparatus, and multi charged pa...

Multi charged particle beam writing method and multi charged partic...

Multi-charged particle beam writing apparatus and multi-charged par...

Multi charged particle beam writing apparatus and multi charged par...

Multi charged particle beam writing apparatus and multi charged par...

Multi charged particle beam writing apparatus, and multi charged pa...

Multi charged particle beam writing apparatus, and multi charged pa...

Multi charged particle beam writing method and multi charged partic...

Shot data generation method and multi charged particle beam writing...

Charged particle beam writing apparatus, and method for detecting i...

Multi charged particle beam writing method and multi charged partic...

Charged particle beam writing apparatus and charged particle beam w...

Charged particle beam pattern forming apparatus and charged particl...

Charged particle beam writing apparatus and charged particle beam w...

Tracking control method and electron beam writing system

Data transfer system

Lithography system and lithography method using the same

Pattern writing method

Patents Applicationslast 30 patents

MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTIPLE CHAR...

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

MULTIPLE CHARGED PARTICLE BEAM WRITING METHOD, AND MULTIPLE CHARGED...

MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTIPLE CHAR...

DRAWING DEVICE AND DRAWING METHOD

MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...

MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...

MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI-CHARGED PAR...

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI CHARGED PA...

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI CHARGED PA...

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI CHARGED PA...

MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...

CHARGED PARTICLE BEAM WRITING APPARATUS, AND METHOD FOR DETECTING I...

SHOT DATA GENERATION METHOD AND MULTI CHARGED PARTICLE BEAM WRITING...

MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

CHARGED PARTICLE BEAM PATTERN FORMING APPARATUS AND CHARGED PARTICL...

TRACKING CONTROL METHOD AND ELECTRON BEAM WRITING SYSTEM

DATA TRANSFER SYSTEM

LITHOGRAPHY SYSTEM AND LITHOGRAPHY METHOD USING THE SAME

LITHOGRAPHY SYSTEM AND ERROR DETECTION METHOD IN SAME