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Hideo Kobinata
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Drawing pattern verifying method
Patent number
6,741,733
Issue date
May 25, 2004
NEC Electronics Corporation
Hideo Kobinata
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for designing EB mask
Patent number
6,638,665
Issue date
Oct 28, 2003
NEC Electronics Corporation
Hideo Kobinata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of electron-beam exposure and mask and electron-beam exposur...
Patent number
6,597,001
Issue date
Jul 22, 2003
NEC Electronics Corporation
Hiroshi Yamashita
G01 - MEASURING TESTING
Information
Patent Grant
Electron beam exposure mask and method for manufacturing electron b...
Patent number
6,492,070
Issue date
Dec 10, 2002
NEC Corporation
Hideo Kobinata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mask inspecting apparatus and mask inspecting method which can insp...
Patent number
6,462,346
Issue date
Oct 8, 2002
NEC Corporation
Hideo Kobinata
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method of and apparatus for designing EB mask
Publication number
20020037459
Publication date
Mar 28, 2002
NEC Corporation
Hideo Kobinata
B82 - NANO-TECHNOLOGY
Information
Patent Application
Electron beam mask, production method thereof, and exposure method
Publication number
20010016292
Publication date
Aug 23, 2001
Hideo Kobinata
H01 - BASIC ELECTRIC ELEMENTS