Hideo Mizutani

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate case and substrate accommodation apparatus
- Patent number 11,342,206
- Issue date May 24, 2022
- Nikon Corporation
- Hideo Mizutani
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate case and substrate accommodation apparatus
- Patent number 10,541,160
- Issue date Jan 21, 2020
- Nikon Corporation
- Hideo Mizutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern forming device, pattern forming method, and device manufact...
- Patent number 9,152,062
- Issue date Oct 6, 2015
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for measuring expansion/contraction, method for processing s...
- Patent number 8,399,263
- Issue date Mar 19, 2013
- Nikon Corporation
- Tohru Kiuchi
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Pattern formation apparatus, pattern formation method, and device m...
- Patent number 8,379,186
- Issue date Feb 19, 2013
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method of manufacturing de...
- Patent number 8,264,666
- Issue date Sep 11, 2012
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern forming device, pattern forming method, and device manufact...
- Patent number 8,235,695
- Issue date Aug 7, 2012
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 7,460,207
- Issue date Dec 2, 2008
- Nikon Corporation
- Hideo Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 7,436,487
- Issue date Oct 14, 2008
- Nikon Corporation
- Hideo Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 7,379,158
- Issue date May 27, 2008
- Nikon Corporation
- Hideo Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Holding apparatus, holding method, exposure apparatus and device ma...
- Patent number 7,081,946
- Issue date Jul 25, 2006
- Nikon Corporation
- Tsuneyuki Hagiwara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus and methods utilizing plural mask and object sta...
- Patent number 6,894,763
- Issue date May 17, 2005
- Nikon Corporation
- Seiro Murakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for detecting the position of a surface to be...
- Patent number 6,320,658
- Issue date Nov 20, 2001
- Nikon Corporation
- Hideo Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, method of producing the same, and method of pro...
- Patent number 6,304,319
- Issue date Oct 16, 2001
- Nikon Corporation
- Hideo Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fast fourier transform processing device, fast fourier transform pr...
- Patent number 6,230,176
- Issue date May 8, 2001
- Hideo Mizutani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Alignment apparatus in projection exposure apparatus
- Patent number 6,153,886
- Issue date Nov 28, 2000
- Nikon Corporation
- Shigeru Hagiwara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus utilizing surface position detection, method the...
- Patent number 6,124,933
- Issue date Sep 26, 2000
- Nikon Corporation
- Hideo Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cata-dioptric reduction projection optical system
- Patent number RE36740
- Issue date Jun 20, 2000
- Nikon Corporation
- Yutaka Ichihara
- 359 - Optical: systems and elements
Information Patent Grant
Exposure apparatus
- Patent number 5,995,198
- Issue date Nov 30, 1999
- Nikon Corporation
- Hideo Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Variable-magnification telecentric optical system
- Patent number 5,805,347
- Issue date Sep 8, 1998
- Nikon Corporation
- Hideo Mizutani
- G02 - OPTICS
Information Patent Grant
Surface position detection apparatus and method
- Patent number 5,801,835
- Issue date Sep 1, 1998
- Nikon Corporation
- Hideo Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for positioning with a high accuracy
- Patent number 5,796,114
- Issue date Aug 18, 1998
- Nikon Corporation
- Hideo Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 5,757,505
- Issue date May 26, 1998
- Nikon Corporation
- Hideo Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and method
- Patent number 5,751,403
- Issue date May 12, 1998
- Nikon Corporation
- Hideo Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 5,734,478
- Issue date Mar 31, 1998
- Nikon Corporation
- Nobutaka Magome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus
- Patent number 5,689,339
- Issue date Nov 18, 1997
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus and exposure apparatus equipped therewith
- Patent number 5,684,595
- Issue date Nov 4, 1997
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detection apparatus
- Patent number 5,633,721
- Issue date May 27, 1997
- Nikon Corporation
- Hideo Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detecting apparatus and method
- Patent number 5,602,399
- Issue date Feb 11, 1997
- Nikon Corporation
- Hideo Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detection apparatus
- Patent number 5,587,794
- Issue date Dec 24, 1996
- Nikon Corporation
- Hideo Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CASE AND SUBSTRATE ACCOMMODATION APPARATUS
- Publication number 20200118847
- Publication date Apr 16, 2020
- Nikon Corporation
- Hideo MIZUTANI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
EXPOSURE APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND DEVICE MANU...
- Publication number 20130027684
- Publication date Jan 31, 2013
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMING DEVICE, PATTERN FORMING METHOD, AND DEVICE MANUFACT...
- Publication number 20120270144
- Publication date Oct 25, 2012
- NIKON CORPORATION
- Tohru KIUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CASE AND SUBSTRATE ACCOMMODATION APPARATUS
- Publication number 20110155838
- Publication date Jun 30, 2011
- Hideo MIZUTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN FORMATION APPARATUS, PATTERN FORMATION METHOD, AND DEVICE M...
- Publication number 20110013162
- Publication date Jan 20, 2011
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMING DEVICE, PATTERN FORMING METHOD, AND DEVICE MANUFACT...
- Publication number 20110012294
- Publication date Jan 20, 2011
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTRUING DE...
- Publication number 20100265483
- Publication date Oct 21, 2010
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR MEASURING EXPANSION/CONTRACTION, METHOD FOR PROCESSING S...
- Publication number 20100105153
- Publication date Apr 29, 2010
- Tohru Kiuchi
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
Exposure Apparatus, Exposure Method and Device Manufacturing Method...
- Publication number 20070247640
- Publication date Oct 25, 2007
- Nikon Corporation
- Nobutaka Magome
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Holding apparatus, holding method, exposure apparatus and device ma...
- Publication number 20060146312
- Publication date Jul 6, 2006
- Nikon Corporation
- Tsuneyuki Hagiwara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method for producing device
- Publication number 20060126043
- Publication date Jun 15, 2006
- Nikon Corporation
- Hideo Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method for producing device
- Publication number 20060126044
- Publication date Jun 15, 2006
- Nikon Corporation
- Hideo Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method for producing device
- Publication number 20050264774
- Publication date Dec 1, 2005
- Nikon Corporation
- Hideo Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Holding apparatus, holding method, exposure apparatus and device ma...
- Publication number 20040100624
- Publication date May 27, 2004
- Nikon Corporation
- Tsuneyuki Hagiwara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and methods utilizing plural mask and object sta...
- Publication number 20030218730
- Publication date Nov 27, 2003
- NIKON CORPORATION
- Seiro Murakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Symbol window correlative operation circuit and address generation...
- Publication number 20030023779
- Publication date Jan 30, 2003
- Hideo Mizutani
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Alignment method, exposure method, exposure apparatus and device ma...
- Publication number 20010055117
- Publication date Dec 27, 2001
- NIKON CORPORATION
- Hideo Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hideo Mizutani

Person

Patents Grantslast 30 patents

Substrate case and substrate accommodation apparatus

Substrate case and substrate accommodation apparatus

Pattern forming device, pattern forming method, and device manufact...

Method for measuring expansion/contraction, method for processing s...

Pattern formation apparatus, pattern formation method, and device m...

Exposure apparatus, exposure method, and method of manufacturing de...

Pattern forming device, pattern forming method, and device manufact...

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Holding apparatus, holding method, exposure apparatus and device ma...

Exposure apparatus and methods utilizing plural mask and object sta...

Apparatus and method for detecting the position of a surface to be...

Exposure apparatus, method of producing the same, and method of pro...

Fast fourier transform processing device, fast fourier transform pr...

Alignment apparatus in projection exposure apparatus

Exposure apparatus utilizing surface position detection, method the...

Cata-dioptric reduction projection optical system

Exposure apparatus

Variable-magnification telecentric optical system

Surface position detection apparatus and method

Exposure apparatus and method for positioning with a high accuracy

Exposure apparatus

Projection exposure apparatus and method

Projection exposure apparatus

Alignment apparatus

Alignment apparatus and exposure apparatus equipped therewith

Surface position detection apparatus

Surface position detecting apparatus and method

Surface position detection apparatus

Patents Applicationslast 30 patents

SUBSTRATE CASE AND SUBSTRATE ACCOMMODATION APPARATUS

EXPOSURE APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND DEVICE MANU...

PATTERN FORMING DEVICE, PATTERN FORMING METHOD, AND DEVICE MANUFACT...

SUBSTRATE CASE AND SUBSTRATE ACCOMMODATION APPARATUS

PATTERN FORMATION APPARATUS, PATTERN FORMATION METHOD, AND DEVICE M...

PATTERN FORMING DEVICE, PATTERN FORMING METHOD, AND DEVICE MANUFACT...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTRUING DE...

METHOD FOR MEASURING EXPANSION/CONTRACTION, METHOD FOR PROCESSING S...

Exposure Apparatus, Exposure Method and Device Manufacturing Method...

Holding apparatus, holding method, exposure apparatus and device ma...

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Holding apparatus, holding method, exposure apparatus and device ma...

Exposure apparatus and methods utilizing plural mask and object sta...

Symbol window correlative operation circuit and address generation...

Alignment method, exposure method, exposure apparatus and device ma...