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Hideo Sakai
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Musashino, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Pattern generating apparatus and pattern shape evaluating apparatus
Patent number
8,655,050
Issue date
Feb 18, 2014
Hitachi High-Technologies Corporation
Yasutaka Toyoda
G01 - MEASURING TESTING
Information
Patent Grant
Pattern generating apparatus and pattern shape evaluating apparatus
Patent number
8,515,155
Issue date
Aug 20, 2013
Hitachi High-Technologies Corporation
Yasutaka Toyoda
G01 - MEASURING TESTING
Information
Patent Grant
Pattern generating apparatus and pattern shape evaluating apparatus
Patent number
8,363,923
Issue date
Jan 29, 2013
Hitachi High-Technologies Corporation
Yasutaka Toyoda
G01 - MEASURING TESTING
Information
Patent Grant
Pattern generating apparatus and pattern shape evaluating apparatus
Patent number
8,077,962
Issue date
Dec 13, 2011
Hitachi High-Technologies Corporation
Yasutaka Toyoda
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
PATTERN GENERATING APPARATUS AND PATTERN SHAPE EVALUATING APPARATUS
Publication number
20130315468
Publication date
Nov 28, 2013
Hitachi High-Technologies Corporation
Yasutaka TOYODA
G01 - MEASURING TESTING
Information
Patent Application
PATTERN GENERATING APPARATUS AND PATTERN SHAPE EVALUATING APPARATUS
Publication number
20130136335
Publication date
May 30, 2013
Hitachi High-Technologies Corporation
Yasutaka TOYODA
G01 - MEASURING TESTING
Information
Patent Application
PATTERN GENERATING APPARATUS AND PATTERN SHAPE EVALUATING APPARATUS
Publication number
20120057774
Publication date
Mar 8, 2012
Hitachi High-Technologies Corporation
Yasutaka TOYODA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method and System for Wafer Inspection
Publication number
20110096309
Publication date
Apr 28, 2011
IMEC
Vincent Jean-Marie Pierre Paul Wiaux
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERN GENERATING APPARATUS AND PATTERN SHAPE EVALUATING APPARATUS
Publication number
20090202139
Publication date
Aug 13, 2009
Yasutaka TOYODA
G06 - COMPUTING CALCULATING COUNTING