Hideomi HOSAKA

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and charge neutralization method for...
- Patent number 11,862,439
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Takahiro Kawawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and apparatus
- Patent number 11,189,461
- Issue date Nov 30, 2021
- Tokyo Electron Limited
- Yoshinori Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CHARGE NEUTRALIZATION METHOD FOR...
- Publication number 20200312636
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Takahiro KAWAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND APPARATUS
- Publication number 20200294767
- Publication date Sep 17, 2020
- TOKYO ELECTRON LIMITED
- Yoshinori YAMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...