Hidetaka Nakao

Person

Ebina, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 10,688,622
- Issue date Jun 23, 2020
- Ebara Corporation
- Hiroshi Aono
- B08 - CLEANING
Information Patent Grant
Film thickness signal processing apparatus, polishing apparatus, fi...
- Patent number 9,555,517
- Issue date Jan 31, 2017
- Ebara Corporation
- Taro Takahashi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 9,144,881
- Issue date Sep 29, 2015
- Ebara Corporation
- Hidetaka Nakao
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing apparatus
- Patent number 8,388,409
- Issue date Mar 5, 2013
- Ebara Corporation
- Hidetaka Nakao
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and program thereof
- Patent number 8,206,197
- Issue date Jun 26, 2012
- Ebara Corporation
- Hidetaka Nakao
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 8,078,306
- Issue date Dec 13, 2011
- Ebara Corporation
- Hidetaka Nakao
- B24 - GRINDING POLISHING
Information Patent Grant
Hand having rocking mechanism and substrate delivering device havin...
- Patent number 8,038,136
- Issue date Oct 18, 2011
- Kabushiki Kaisha Yaskawa Denki
- Hiroki Sanemasa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Polishing apparatus
- Patent number RE38215
- Issue date Aug 12, 2003
- Ebara Corporation
- Miki Shibata
- 451 - Abrading
Information Patent Grant
Polishing apparatus
- Patent number 6,074,276
- Issue date Jun 13, 2000
- Ebara Corporation
- Miki Shibata
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 5,885,134
- Issue date Mar 23, 1999
- Ebara Corporation
- Miki Shibata
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180001440
- Publication date Jan 4, 2018
- EBARA CORPORATION
- Hiroshi AONO
- B08 - CLEANING
Information Patent Application
FILM THICKNESS SIGNAL PROCESSING APPARATUS, POLISHING APPARATUS, FI...
- Publication number 20160074987
- Publication date Mar 17, 2016
- EBARA CORPORATION
- Taro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20140242885
- Publication date Aug 28, 2014
- Hidetaka Nakao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE POLISHING APPARATUS
- Publication number 20100151770
- Publication date Jun 17, 2010
- Hidetaka Nakao
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND PROGRAM THEREOF
- Publication number 20100130103
- Publication date May 27, 2010
- Hidetaka Nakao
- G05 - CONTROLLING REGULATING
Information Patent Application
HAND HAVING ROCKING MECHANISM AND SUBSTRATE DELIVERING DEVICE HAVIN...
- Publication number 20090236786
- Publication date Sep 24, 2009
- KABUSHIKI KAISHA YASKAWA DENKI
- Hiroki SANEMASA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Polishing apparatus and polishing method
- Publication number 20090111358
- Publication date Apr 30, 2009
- EBARA CORPORATION
- Hidetaka Nakao
- B24 - GRINDING POLISHING
Information Patent Application
Substrate polishing apparatus
- Publication number 20050142991
- Publication date Jun 30, 2005
- Hidetaka Nakao
- B24 - GRINDING POLISHING

Hidetaka Nakao

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Film thickness signal processing apparatus, polishing apparatus, fi...

Polishing apparatus and polishing method

Substrate polishing apparatus

Polishing apparatus and program thereof

Polishing apparatus and polishing method

Hand having rocking mechanism and substrate delivering device havin...

Polishing apparatus

Polishing apparatus

Polishing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

FILM THICKNESS SIGNAL PROCESSING APPARATUS, POLISHING APPARATUS, FI...

POLISHING APPARATUS AND POLISHING METHOD

SUBSTRATE POLISHING APPARATUS

POLISHING APPARATUS AND PROGRAM THEREOF

HAND HAVING ROCKING MECHANISM AND SUBSTRATE DELIVERING DEVICE HAVIN...

Polishing apparatus and polishing method

Substrate polishing apparatus