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Hidetaka Shinohara
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Kumamoto, JP
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing apparatus, substrate processing method and rec...
Patent number
11,084,072
Issue date
Aug 10, 2021
Tokyo Electron Limited
Shogo Fukui
B08 - CLEANING
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Patent Grant
Substrate processing apparatus, substrate processing method and sto...
Patent number
10,553,421
Issue date
Feb 4, 2020
Tokyo Electron Limited
Seiki Ishida
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
Publication number
20180200764
Publication date
Jul 19, 2018
TOKYO ELECTRON LIMITED
Shogo Fukui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
Publication number
20160336170
Publication date
Nov 17, 2016
TOKYO ELECTRON LIMITED
Seiki Ishida
B08 - CLEANING