Hidetatsu ISOKAWA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method, device, and non-transitory computer readable medium for det...
- Patent number 12,119,246
- Issue date Oct 15, 2024
- Ebara Corporation
- Hidetatsu Isokawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,541,502
- Issue date Jan 3, 2023
- Ebara Corporation
- Kuniaki Yamaguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Cleaning device, substrate processing apparatus, maintenance method...
- Patent number 11,380,561
- Issue date Jul 5, 2022
- Ebara Corporation
- Hidetatsu Isokawa
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,173,523
- Issue date Nov 16, 2021
- Ebara Corporation
- Hidetatsu Isokawa
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and method of controlling the same
- Patent number 10,957,546
- Issue date Mar 23, 2021
- Ebara Corporation
- Hidetatsu Isokawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Teaching device and teaching method
- Patent number 10,845,777
- Issue date Nov 24, 2020
- Ebara Corporation
- Hidetatsu Isokawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,688,622
- Issue date Jun 23, 2020
- Ebara Corporation
- Hiroshi Aono
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus and substrate processing apparatus
- Patent number 10,573,509
- Issue date Feb 25, 2020
- Ebara Corporation
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD, DEVICE, AND NON-TRANSITORY COMPUTER READABLE MEDIUM FOR DET...
- Publication number 20220139741
- Publication date May 5, 2022
- EBARA CORPORATION
- HIDETATSU ISOKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210394332
- Publication date Dec 23, 2021
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
CLEANING DEVICE, SUBSTRATE PROCESSING APPARATUS, MAINTENANCE METHOD...
- Publication number 20210175099
- Publication date Jun 10, 2021
- EBARA CORPORATION
- Hidetatsu Isokawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEACHING APPARATUS AND TEACHING METHOD FOR SUBSTRATE TRANSFER SYSTEM
- Publication number 20190378740
- Publication date Dec 12, 2019
- EBARA CORPORATION
- Hidetatsu Isokawa
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190355594
- Publication date Nov 21, 2019
- EBARA CORPORATION
- Hidetatsu ISOKAWA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF CONTROLLING THE SAME
- Publication number 20180315611
- Publication date Nov 1, 2018
- EBARA CORPORATION
- Hidetatsu ISOKAWA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180001440
- Publication date Jan 4, 2018
- EBARA CORPORATION
- Hiroshi AONO
- B08 - CLEANING
Information Patent Application
CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20170372893
- Publication date Dec 28, 2017
- EBARA CORPORATION
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEACHING DEVICE AND TEACHING METHOD
- Publication number 20170285609
- Publication date Oct 5, 2017
- EBARA CORPORATION
- Hidetatsu ISOKAWA
- G05 - CONTROLLING REGULATING

Hidetatsu ISOKAWA

Person

Patents Grantslast 30 patents

Method, device, and non-transitory computer readable medium for det...

Substrate processing apparatus

Cleaning device, substrate processing apparatus, maintenance method...

Substrate processing apparatus

Substrate processing apparatus and method of controlling the same

Teaching device and teaching method

Substrate processing apparatus

Cleaning apparatus and substrate processing apparatus

Patents Applicationslast 30 patents

METHOD, DEVICE, AND NON-TRANSITORY COMPUTER READABLE MEDIUM FOR DET...

SUBSTRATE PROCESSING APPARATUS

CLEANING DEVICE, SUBSTRATE PROCESSING APPARATUS, MAINTENANCE METHOD...

TEACHING APPARATUS AND TEACHING METHOD FOR SUBSTRATE TRANSFER SYSTEM

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD OF CONTROLLING THE SAME

SUBSTRATE PROCESSING APPARATUS

CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

TEACHING DEVICE AND TEACHING METHOD