Hideto Gotoh

Person

Ibaraki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Cleaning agent and cleaning method
- Patent number 6,875,288
- Issue date Apr 5, 2005
- Tokyo Electron Limited
- Hideto Gotoh
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Cleaning method using an oxidizing agent, chelating agent and fluor...
- Patent number 6,514,352
- Issue date Feb 4, 2003
- Tokyo Electron Limited
- Hideto Gotoh
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Cleaning device, cleaning system, treating device and cleaning method
- Patent number 6,478,035
- Issue date Nov 12, 2002
- Tokyo Electron Limited
- Takayuki Niuya
- B08 - CLEANING
Information Patent Grant
Cleaning agent for a semiconductor device and a method of manufactu...
- Patent number 6,462,005
- Issue date Oct 8, 2002
- Texas Instruments Incorporated
- Hideto Gotoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cleaning agent for use in producing semiconductor devices and proce...
- Patent number 6,265,309
- Issue date Jul 24, 2001
- Mitsubishi Gas Chemicals Co., Inc.
- Hideto Gotoh
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Rinsing solution after resist stripping process and method for manu...
- Patent number 5,885,901
- Issue date Mar 23, 1999
- Texas Instruments Incorporated
- Hideto Gotoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device fabrication method
- Patent number 5,650,041
- Issue date Jul 22, 1997
- Texas Instruments Incorporated
- Hideto Gotoh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing apparatus and method thereof
- Publication number 20050028929
- Publication date Feb 10, 2005
- Kenji Furusawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning method
- Publication number 20020066465
- Publication date Jun 6, 2002
- Hideto Gotoh
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Cleaning agent and cleaning method
- Publication number 20020064963
- Publication date May 30, 2002
- Hideto Gotoh
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...

Hideto Gotoh

Person

Patents Grantslast 30 patents

Cleaning agent and cleaning method

Cleaning method using an oxidizing agent, chelating agent and fluor...

Cleaning device, cleaning system, treating device and cleaning method

Cleaning agent for a semiconductor device and a method of manufactu...

Cleaning agent for use in producing semiconductor devices and proce...

Rinsing solution after resist stripping process and method for manu...

Semiconductor device fabrication method

Patents Applicationslast 30 patents

Substrate processing apparatus and method thereof

Cleaning method

Cleaning agent and cleaning method