Hideto Mori

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Koshi-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, method for processing substrate, an...
- Patent number 8,992,687
- Issue date Mar 31, 2015
- Tokyo Electron Limited
- Hiroyuki Kudoh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR PROCESSING SUBSTRATE, AN...
- Publication number 20110308464
- Publication date Dec 22, 2011
- TOKYO ELECTRON LIMITED
- Hiroyuki Kudoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR PROCESSING SUBSTRATE, AN...
- Publication number 20090029046
- Publication date Jan 29, 2009
- TOKYO ELECTRON LIMITED
- Hiroyuki Kudoh
- H01 - BASIC ELECTRIC ELEMENTS