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Vacuum processing apparatus
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Patent number 11,923,178
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Issue date Mar 5, 2024
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ULVAC, Inc.
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Koji Suzuki
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Sputtering apparatus
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Issue date Jan 10, 2023
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ULVAC, Inc.
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Koji Suzuki
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing method
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Patent number 8,956,513
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Issue date Feb 17, 2015
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ULVAC, Inc.
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Shinya Nakamura
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Sputtering apparatus
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Issue date Feb 19, 2013
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ULVAC, Inc.
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Naoki Morimoto
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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