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Hideto Nagashima

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Patents Grantslast 30 patents

  • Information Patent Grant

    Cathode unit for magnetron sputtering apparatus and magnetron sputt...
    • Patent number 12,112,929
    • Issue date Oct 8, 2024
    • ULVAC, Inc.
    • Koji Suzuki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 11,923,178
    • Issue date Mar 5, 2024
    • ULVAC, Inc.
    • Koji Suzuki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering target and method of producing the same
    • Patent number 11,629,400
    • Issue date Apr 18, 2023
    • Ulvac, Inc.
    • Akira Nakamura
    • B21 - MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL PUNCHING...
  • Information Patent Grant

    Sputtering apparatus
    • Patent number 11,549,173
    • Issue date Jan 10, 2023
    • ULVAC, Inc.
    • Koji Suzuki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing method
    • Patent number 8,956,513
    • Issue date Feb 17, 2015
    • ULVAC, Inc.
    • Shinya Nakamura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering apparatus
    • Patent number 8,377,269
    • Issue date Feb 19, 2013
    • ULVAC, Inc.
    • Naoki Morimoto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering apparatus and film manufacturing method
    • Patent number 6,706,155
    • Issue date Mar 16, 2004
    • Qlvac, Inc.
    • Naoki Morimoto
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    CATHODE UNIT FOR MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUTT...
    • Publication number 20230138552
    • Publication date May 4, 2023
    • Ulvac, Inc.
    • Koji Suzuki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING APPARATUS
    • Publication number 20220145445
    • Publication date May 12, 2022
    • Ulvac, Inc.
    • Koji Suzuki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Vacuum Processing Apparatus
    • Publication number 20210319985
    • Publication date Oct 14, 2021
    • Ulvac, Inc.
    • Koji Suzuki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING TARGET AND METHOD OF PRODUCING THE SAME
    • Publication number 20210087672
    • Publication date Mar 25, 2021
    • ULVAC, Inc.
    • Akira NAKAMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD
    • Publication number 20120111833
    • Publication date May 10, 2012
    • Shinya Nakamura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING APPARATUS
    • Publication number 20110062019
    • Publication date Mar 17, 2011
    • Naoki Morimoto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Sputtering apparatus and film manufacturing method
    • Publication number 20020029960
    • Publication date Mar 14, 2002
    • Naoki Morimoto
    • H01 - BASIC ELECTRIC ELEMENTS