Hideto SAITO

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Oyama City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Gas lock device and extreme ultraviolet light generation apparatus
- Patent number 9,253,866
- Issue date Feb 2, 2016
- Gigaphoton Inc.
- Hiroshi Someya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
GAS LOCK DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20140216576
- Publication date Aug 7, 2014
- GIGAPHOTON INC.
- Hiroshi SOMEYA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR