Hidetomo Uemukai

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and liquid mixing method
- Patent number 10,067,514
- Issue date Sep 4, 2018
- Tokyo Electron Limited
- Yasuo Kiyohara
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Cleaning processing system and cleaning processing apparatus
- Patent number 7,451,515
- Issue date Nov 18, 2008
- Tokyo Electron Limited
- Hidetomo Uemukai
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND LIQUID MIXING METHOD
- Publication number 20150146498
- Publication date May 28, 2015
- TOKYO ELECTRON LIMITED
- Yasuo Kiyohara
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Substrate Liquid Processing Apparatus, Substrate Liquid Processing...
- Publication number 20120164339
- Publication date Jun 28, 2012
- TOKYO ELECTRON LIMITED
- Mitsunori NAKAMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning processing system and cleaning processing apparatus
- Publication number 20050022325
- Publication date Feb 3, 2005
- Hidetomo Uemukai
- B08 - CLEANING
Information Patent Application
Cleaning processing system and cleaning processing apparatus
- Publication number 20020059686
- Publication date May 23, 2002
- Hidetomo Uemukai
- H01 - BASIC ELECTRIC ELEMENTS