Hidetoshi FUJII

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Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing micromechanical structures in a device wafer
- Patent number 11,524,893
- Issue date Dec 13, 2022
- Murata Manufacturing Co., Ltd.
- Hidetoshi Fujii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing micromechanical structures in a device wafer
- Patent number 10,807,863
- Issue date Oct 20, 2020
- Murata Manufacturing Co., Ltd.
- Hidetoshi Fujii
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR STRUCTURAL LAYER FABRICATION IN MICROMECHANICAL DEVICES
- Publication number 20230192480
- Publication date Jun 22, 2023
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MICROMECHANICAL STRUCTURES IN A DEVICE WAFER
- Publication number 20210002131
- Publication date Jan 7, 2021
- Murata Manufacturing Co., Ltd.
- Hidetoshi FUJII
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR RECESS ETCHING IN MICROMECHANICAL DEVICES
- Publication number 20180346326
- Publication date Dec 6, 2018
- Murata Manufacturing Co., Ltd.
- Hidetoshi FUJII
- B81 - MICRO-STRUCTURAL TECHNOLOGY