Hidetoshi KIMURA

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Position detecting system and processing apparatus
- Patent number 10,199,251
- Issue date Feb 5, 2019
- Tokyo Electron Limited
- Kippei Sugita
- G01 - MEASURING TESTING
Information Patent Grant
Gas temperature measurement method and gas introduction system
- Patent number 10,090,178
- Issue date Oct 2, 2018
- Tokyo Electron Limited
- Hidetoshi Kimura
- G01 - MEASURING TESTING
Information Patent Grant
Plasma processing apparatus, plasma processing method and storage m...
- Patent number 10,020,172
- Issue date Jul 10, 2018
- Tokyo Electron Limited
- Mitsunori Ohata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus, plasma processing method and storage m...
- Patent number 9,076,636
- Issue date Jul 7, 2015
- Tokyo Electron Limited
- Mitsunori Ohata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measuring apparatus and plasma processing apparatus
- Patent number 9,070,725
- Issue date Jun 30, 2015
- Tokyo Electron Limited
- Tatsuo Matsudo
- G01 - MEASURING TESTING
Information Patent Grant
Electrostatic chuck
- Patent number 7,663,860
- Issue date Feb 16, 2010
- Tokyo Electron Limited
- Shinya Nishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetron plasma processing apparatus
- Patent number 6,764,575
- Issue date Jul 20, 2004
- Tokyo Electron Limited
- Tomomi Yamasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus
- Patent number 6,702,899
- Issue date Mar 9, 2004
- Tokyo Electron Limited
- Makoto Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process device
- Patent number 6,436,230
- Issue date Aug 20, 2002
- Tokyo Electron Limited
- Tomomi Kondo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus
- Patent number 6,355,109
- Issue date Mar 12, 2002
- Tokyo Electron Limited
- Makoto Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Probe card assembly and method of manufacturing probe card assembly
- Patent number 5,521,523
- Issue date May 28, 1996
- Tokyo Electron Limited
- Hidetoshi Kimura
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
POSITION DETECTING SYSTEM AND PROCESSING APPARATUS
- Publication number 20180301322
- Publication date Oct 18, 2018
- TOKYO ELECTRON LIMITED
- Kippei SUGITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS TEMPERATURE MEASUREMENT METHOD AND GAS INTRODUCTION SYSTEM
- Publication number 20170148653
- Publication date May 25, 2017
- TOKYO ELECTRON LIMITED
- Hidetoshi KIMURA
- G01 - MEASURING TESTING
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...
- Publication number 20150255255
- Publication date Sep 10, 2015
- TOKYO ELECTRON LIMITED
- Mitsunori Ohata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MEASURING APPARATUS AND PLASMA PROCESSING APPARATUS
- Publication number 20120247669
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Tatsuo MATSUDO
- G01 - MEASURING TESTING
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...
- Publication number 20120061351
- Publication date Mar 15, 2012
- TOKYO ELECTRON LIMITED
- Mitsunori Ohata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate mounting table, substrate processing apparatus and substr...
- Publication number 20060090855
- Publication date May 4, 2006
- TOKYO ELECTRON LIMITED
- Hidetoshi Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic chuck
- Publication number 20050207088
- Publication date Sep 22, 2005
- TOKYO ELECTRON LIMITED
- Shinya Nishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vacuum processing apparatus
- Publication number 20020117112
- Publication date Aug 29, 2002
- MAKOTO OKABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20010052393
- Publication date Dec 20, 2001
- MAKOTO OKABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hidetoshi KIMURA

Person

Patents Grantslast 30 patents

Position detecting system and processing apparatus

Gas temperature measurement method and gas introduction system

Plasma processing apparatus, plasma processing method and storage m...

Plasma processing apparatus, plasma processing method and storage m...

Measuring apparatus and plasma processing apparatus

Electrostatic chuck

Magnetron plasma processing apparatus

Vacuum processing apparatus

Process device

Vacuum processing apparatus

Probe card assembly and method of manufacturing probe card assembly

Patents Applicationslast 30 patents

POSITION DETECTING SYSTEM AND PROCESSING APPARATUS

GAS TEMPERATURE MEASUREMENT METHOD AND GAS INTRODUCTION SYSTEM

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...

MEASURING APPARATUS AND PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...

Substrate mounting table, substrate processing apparatus and substr...

Electrostatic chuck

Vacuum processing apparatus

VACUUM PROCESSING APPARATUS