Hidetoshi Nishiyama

Person

Hitachinaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Defect inspection device and defect inspection method
- Patent number 9,778,206
- Issue date Oct 3, 2017
- Hitachi High-Technologies Corporation
- Toshifumi Honda
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for inspecting defect with time/spatial division optical...
- Patent number 9,602,780
- Issue date Mar 21, 2017
- Hitachi High-Technologies Corporation
- Masaaki Ito
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Inspection system
- Patent number 9,535,009
- Issue date Jan 3, 2017
- Hitachi High-Technologies Corporation
- Kenshiro Ohtsubo
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting pattern defect
- Patent number 9,182,359
- Issue date Nov 10, 2015
- Hitachi High-Technologies Corporation
- Hisashi Hatano
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for reviewing defects
- Patent number 8,975,582
- Issue date Mar 10, 2015
- Hitachi High-Technologies Corporation
- Hidetoshi Nishiyama
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus
- Patent number 8,902,417
- Issue date Dec 2, 2014
- Hitachi High-Technologies Corporation
- Nobuaki Hirose
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting patterns formed on a substrate
- Patent number 8,824,774
- Issue date Sep 2, 2014
- Hitachi High-Technologies Corporation
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect inspection method and device thereof
- Patent number 8,811,712
- Issue date Aug 19, 2014
- Hitachi High-Technologies Corporation
- Shunji Maeda
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting defect in object surface
- Patent number 8,760,643
- Issue date Jun 24, 2014
- Hitachi High-Technologies Corporation
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting pattern and inspecting instrument
- Patent number 8,558,173
- Issue date Oct 15, 2013
- Hitachi, Ltd.
- Mari Nozoe
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting a semiconductor device and an apparatus thereof
- Patent number 8,559,000
- Issue date Oct 15, 2013
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Defects inspecting apparatus and defects inspecting method
- Patent number 8,508,727
- Issue date Aug 13, 2013
- Hitachi High-Technologies Corporation
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting defect on object surface
- Patent number 8,482,728
- Issue date Jul 9, 2013
- Hitachi High-Technologies Corporation
- Sachio Uto
- B08 - CLEANING
Information Patent Grant
Method and apparatus for inspecting patterns formed on a substrate
- Patent number 8,467,594
- Issue date Jun 18, 2013
- Hitachi High-Technologies Corporation
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern defect inspection apparatus and method
- Patent number 8,467,048
- Issue date Jun 18, 2013
- Hitachi High-Technologies Corporation
- Hidetoshi Nishiyama
- G01 - MEASURING TESTING
Information Patent Grant
Pattern defect inspection method and its apparatus
- Patent number 8,410,460
- Issue date Apr 2, 2013
- Hitachi High-Technologies Corporation
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting a semiconductor device and an apparatus thereof
- Patent number 8,274,651
- Issue date Sep 25, 2012
- Hitachi, Ltd.
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for pattern inspection
- Patent number 8,270,700
- Issue date Sep 18, 2012
- Hitachi High-Technologies Corporation
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection method and inspection apparatus
- Patent number 8,269,959
- Issue date Sep 18, 2012
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
System for monitoring foreign particles, process processing apparat...
- Patent number 8,254,662
- Issue date Aug 28, 2012
- Hitachi High-Technologies Corporation
- Hidetoshi Nishiyama
- G01 - MEASURING TESTING
Information Patent Grant
Pattern defect inspection apparatus and method
- Patent number 8,233,145
- Issue date Jul 31, 2012
- Hitachi High-Technologies Corporation
- Hidetoshi Nishiyama
- G01 - MEASURING TESTING
Information Patent Grant
Defects inspecting apparatus and defects inspecting method
- Patent number 8,228,495
- Issue date Jul 24, 2012
- Hitachi High-Technologies Corporation
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting defects
- Patent number 8,218,138
- Issue date Jul 10, 2012
- Hitachi High-Technologies Corporation
- Hiroyuki Nakano
- G01 - MEASURING TESTING
Information Patent Grant
Particle beam system
- Patent number 8,158,937
- Issue date Apr 17, 2012
- Joel Ltd.
- Mitsuru Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method and inspection system using charged particle beam
- Patent number 8,153,969
- Issue date Apr 10, 2012
- Hitachi High-Technologies Corporation
- Atsuko Fukada
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting sample
- Patent number 8,119,994
- Issue date Feb 21, 2012
- Jeol Ltd.
- Hidetoshi Nishiyama
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection apparatus
- Patent number 8,094,295
- Issue date Jan 10, 2012
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for reviewing defects
- Patent number 8,093,557
- Issue date Jan 10, 2012
- Hitachi High-Technologies Corporation
- Hidetoshi Nishiyama
- G01 - MEASURING TESTING
Information Patent Grant
Method and its apparatus for inspecting particles or defects of a s...
- Patent number 8,072,597
- Issue date Dec 6, 2011
- Hitachi, Ltd.
- Hidetoshi Nishiyama
- G01 - MEASURING TESTING
Information Patent Grant
Redundant failover system, redundancy managing apparatus and applic...
- Patent number 8,051,322
- Issue date Nov 1, 2011
- Hitachi Kokusai Electric Inc.
- Norihisa Matsumoto
- H04 - ELECTRIC COMMUNICATION TECHNIQUE

Patents Applicationslast 30 patents

Information Patent Application
Alignment Device and Alignment Method
- Publication number 20230326870
- Publication date Oct 12, 2023
- Hitachi High-Tech Corporation
- Shohei HAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PRODUCING PAINT, METHOD OF PRODUCING MAGNETIC RECORDING M...
- Publication number 20220093128
- Publication date Mar 24, 2022
- SONY GROUP CORPORATION
- HIDETOSHI NISHIYAMA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD
- Publication number 20150369752
- Publication date Dec 24, 2015
- Hitachi High-Technologies Corporation
- Toshifumi HONDA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM
- Publication number 20150131087
- Publication date May 14, 2015
- Hitachi High-Technologies Corporation
- Kenshiro Ohtsubo
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING PATTERNS FORMED ON A SUBSTRATE
- Publication number 20130307963
- Publication date Nov 21, 2013
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION APPARATUS
- Publication number 20130271754
- Publication date Oct 17, 2013
- Hitachi High-Technologies Corporation
- Nobuaki Hirose
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING DEFECT IN OBJECT SURFACE
- Publication number 20130269126
- Publication date Oct 17, 2013
- Sachio UTO
- B08 - CLEANING
Information Patent Application
INSPECTION APPARATUS
- Publication number 20130194579
- Publication date Aug 1, 2013
- Yukihisa Mohara
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR PATTERN INSPECTION
- Publication number 20130002849
- Publication date Jan 3, 2013
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF
- Publication number 20120312104
- Publication date Dec 13, 2012
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING PATTERN DEFECT
- Publication number 20120268742
- Publication date Oct 25, 2012
- Hisashi Hatano
- G01 - MEASURING TESTING
Information Patent Application
PATTERN DEFECT INSPECTION APPARATUS AND METHOD
- Publication number 20120268734
- Publication date Oct 25, 2012
- Hitachi High-Technologies Corporation
- Hidetoshi NISHIYAMA
- G01 - MEASURING TESTING
Information Patent Application
DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD
- Publication number 20120262709
- Publication date Oct 18, 2012
- Sachio Uto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION METHOD AND INSPECTION APPARATUS
- Publication number 20120133929
- Publication date May 31, 2012
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR REVIEWING DEFECTS
- Publication number 20120074319
- Publication date Mar 29, 2012
- Hidetoshi Nishiyama
- G02 - OPTICS
Information Patent Application
Method and Its Apparatus for Inspecting Particles or Defects of a S...
- Publication number 20120062890
- Publication date Mar 15, 2012
- Hitachi High-Technologies Corporation
- Hidetoshi Nishiyama
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR REVIEWING DEFECT
- Publication number 20120008132
- Publication date Jan 12, 2012
- Keiya SAITO
- G02 - OPTICS
Information Patent Application
METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF
- Publication number 20120006131
- Publication date Jan 12, 2012
- Akira Hamamatsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System For Monitoring Foreign Particles, Process Processing Apparat...
- Publication number 20120002196
- Publication date Jan 5, 2012
- Hidetoshi Nishiyama
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING PATTERNS FORMED ON A SUBSTRATE
- Publication number 20120002860
- Publication date Jan 5, 2012
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD
- Publication number 20110310382
- Publication date Dec 22, 2011
- Sachio Uto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Sample Holder, Inspection Apparatus, and Inspection Method
- Publication number 20110284745
- Publication date Nov 24, 2011
- JEOL Ltd.
- Hidetoshi Nishiyama
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND DEVICE THEREOF
- Publication number 20110274342
- Publication date Nov 10, 2011
- Shunji Maeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Apparatus and Method for Inspecting Defects
- Publication number 20110255074
- Publication date Oct 20, 2011
- Hiroyuki Nakano
- G01 - MEASURING TESTING
Information Patent Application
PATTERN DEFECT INSPECTING APPARATUS AND METHOD
- Publication number 20110221886
- Publication date Sep 15, 2011
- Hidetoshi Nishiyama
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING AN OBJECT SURFACE DEFECT
- Publication number 20110141272
- Publication date Jun 16, 2011
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING DEFECTS
- Publication number 20110063603
- Publication date Mar 17, 2011
- Hiroyuki Nakano
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING DEFECTS
- Publication number 20100265496
- Publication date Oct 21, 2010
- Hiroyuki Nakano
- G01 - MEASURING TESTING
Information Patent Application
DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD
- Publication number 20100259751
- Publication date Oct 14, 2010
- Sachio Uto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Apparatus and Method for Inspecting Samples
- Publication number 20100243888
- Publication date Sep 30, 2010
- JEOL Ltd.
- Hidetoshi Nishiyama
- H01 - BASIC ELECTRIC ELEMENTS

Hidetoshi Nishiyama

Person

Patents Grantslast 30 patents

Defect inspection device and defect inspection method

Apparatus for inspecting defect with time/spatial division optical...

Inspection system

Apparatus and method for inspecting pattern defect

Method and apparatus for reviewing defects

Inspection apparatus

Method and apparatus for inspecting patterns formed on a substrate

Defect inspection method and device thereof

Apparatus and method for inspecting defect in object surface

Method of inspecting pattern and inspecting instrument

Method of inspecting a semiconductor device and an apparatus thereof

Defects inspecting apparatus and defects inspecting method

Apparatus and method for inspecting defect on object surface

Method and apparatus for inspecting patterns formed on a substrate

Pattern defect inspection apparatus and method

Pattern defect inspection method and its apparatus

Method of inspecting a semiconductor device and an apparatus thereof

Method and apparatus for pattern inspection

Inspection method and inspection apparatus

System for monitoring foreign particles, process processing apparat...

Pattern defect inspection apparatus and method

Defects inspecting apparatus and defects inspecting method

Apparatus and method for inspecting defects

Particle beam system

Inspection method and inspection system using charged particle beam

Apparatus and method for inspecting sample

Inspection method and inspection apparatus

Method and apparatus for reviewing defects

Method and its apparatus for inspecting particles or defects of a s...

Redundant failover system, redundancy managing apparatus and applic...

Patents Applicationslast 30 patents

Alignment Device and Alignment Method

METHOD OF PRODUCING PAINT, METHOD OF PRODUCING MAGNETIC RECORDING M...

DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD

INSPECTION SYSTEM

METHOD AND APPARATUS FOR INSPECTING PATTERNS FORMED ON A SUBSTRATE

INSPECTION APPARATUS

APPARATUS AND METHOD FOR INSPECTING DEFECT IN OBJECT SURFACE

INSPECTION APPARATUS

METHOD AND APPARATUS FOR PATTERN INSPECTION

METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF

APPARATUS AND METHOD FOR INSPECTING PATTERN DEFECT

PATTERN DEFECT INSPECTION APPARATUS AND METHOD

DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD

INSPECTION METHOD AND INSPECTION APPARATUS

METHOD AND APPARATUS FOR REVIEWING DEFECTS

Method and Its Apparatus for Inspecting Particles or Defects of a S...

METHOD AND APPARATUS FOR REVIEWING DEFECT

METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF

System For Monitoring Foreign Particles, Process Processing Apparat...

METHOD AND APPARATUS FOR INSPECTING PATTERNS FORMED ON A SUBSTRATE

DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD

Sample Holder, Inspection Apparatus, and Inspection Method

DEFECT INSPECTION METHOD AND DEVICE THEREOF

Apparatus and Method for Inspecting Defects

PATTERN DEFECT INSPECTING APPARATUS AND METHOD

APPARATUS AND METHOD FOR INSPECTING AN OBJECT SURFACE DEFECT

APPARATUS AND METHOD FOR INSPECTING DEFECTS

APPARATUS AND METHOD FOR INSPECTING DEFECTS

DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD

Apparatus and Method for Inspecting Samples