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Charged particle beam device
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Patent number 8,907,267
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Issue date Dec 9, 2014
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Hitachi High-Technologies Corporation
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Zhigang Wang
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H01 - BASIC ELECTRIC ELEMENTS
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Sample conveying mechanism
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Patent number 8,585,112
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Issue date Nov 19, 2013
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Hitachi High-Technologies Corporation
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Katsuya Kawakami
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H01 - BASIC ELECTRIC ELEMENTS
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Scanning electron microscope
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Patent number 7,566,872
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Issue date Jul 28, 2009
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Hitachi High-Technologies Corporation
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Ritsuo Fukaya
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H01 - BASIC ELECTRIC ELEMENTS
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Piezoelectric sensor
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Patent number 5,376,860
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Issue date Dec 27, 1994
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Oki Ceramic Industry Co, Ltd.
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Hidetoshi Sato
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G01 - MEASURING TESTING