Hidetsugu Yano

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Nirasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Liquid processing apparatus with cleaning jig
- Patent number 9,721,813
- Issue date Aug 1, 2017
- Tokyo Electron Limited
- Nobuhiro Ogata
- B08 - CLEANING
Information Patent Grant
Liquid processing method
- Patent number 9,224,624
- Issue date Dec 29, 2015
- Tokyo Electron Limited
- Takao Inada
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Liquid processing apparatus, liquid processing method and computer-...
- Patent number 8,951,359
- Issue date Feb 10, 2015
- Tokyo Electron Limited
- Takao Inada
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
LIQUID PROCESSING METHOD
- Publication number 20150107631
- Publication date Apr 23, 2015
- TOKYO ELECTRON LIMITED
- Takao Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, CLEANING JIG, AND CLEANING METHOD
- Publication number 20140014134
- Publication date Jan 16, 2014
- Nobuhiro Ogata
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND COMPUTER-...
- Publication number 20110277793
- Publication date Nov 17, 2011
- TOKYO ELECTRON LIMITED
- Takao Inada
- H01 - BASIC ELECTRIC ELEMENTS