Hideya Tanaka

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for washing substrate
- Patent number 6,379,469
- Issue date Apr 30, 2002
- Tokyo Electron Limited
- Hideya Tanaka
- B08 - CLEANING
Information Patent Grant
Apparatus and method for washing substrate
- Patent number 6,158,075
- Issue date Dec 12, 2000
- Tokyo Electron Limited
- Hideya Tanaka
- B08 - CLEANING
Information Patent Grant
Apparatus and method for washing substrate
- Patent number 6,059,891
- Issue date May 9, 2000
- Tokyo Electron Limited
- Minoru Kubota
- B08 - CLEANING
Information Patent Grant
Apparatus and method for developing resist coated on substrate
- Patent number 5,826,130
- Issue date Oct 20, 1998
- Tokyo Electron Limited
- Hideya Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for developing a resist-coated substrate
- Patent number 5,689,749
- Issue date Nov 18, 1997
- Tokyo Electron Limited
- Hideya Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY