Hideyuki Hatoh

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Gas supply method for semiconductor manufacturing apparatus, gas su...
- Patent number 9,460,895
- Issue date Oct 4, 2016
- Tokyo Electron Limited
- Hideyuki Hatoh
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of forming pattern and solid-state image sensor device
- Patent number 9,202,706
- Issue date Dec 1, 2015
- Tokyo Electron Limited
- Takahisa Iwasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device using anisotropic etc...
- Patent number 8,664,117
- Issue date Mar 4, 2014
- Tokyo Electron Limited
- Katsuyuki Ono
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GAS SUPPLY METHOD FOR SEMICONDUCTOR MANUFACTURING APPARATUS, GAS SU...
- Publication number 20140361102
- Publication date Dec 11, 2014
- TOKYO ELECTRON LIMITED
- Hideyuki Hatoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE MOUNTING TABLE AND PLASMA TREATMENT DEVICE
- Publication number 20140311676
- Publication date Oct 23, 2014
- TOKYO ELECTRON LIMITED
- Hideyuki Hatoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING PATTERN AND SOLID-STATE IMAGE SENSOR DEVICE
- Publication number 20140042583
- Publication date Feb 13, 2014
- TOKYO ELECTRON LIMITED
- Takahisa IWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20130052821
- Publication date Feb 28, 2013
- TOKYO ELECTRON LIMITED
- Katsuyuki Ono
- H01 - BASIC ELECTRIC ELEMENTS