Hideyuki Hayashi

Person

Oyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Droplet timing sensor
- Patent number 10,866,338
- Issue date Dec 15, 2020
- Gigaphoton Inc.
- Hideyuki Hayashi
- G01 - MEASURING TESTING
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 9,622,332
- Issue date Apr 11, 2017
- Gigaphoton Inc.
- Toru Suzuki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Extreme ultraviolet light generation apparatus and control method f...
- Patent number 9,468,082
- Issue date Oct 11, 2016
- Gigaphoton Inc.
- Hideyuki Hayashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for generating extreme ultraviolet light and device for gene...
- Patent number 9,277,635
- Issue date Mar 1, 2016
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation apparatus and control method f...
- Patent number 9,131,589
- Issue date Sep 8, 2015
- Gigaphoton Inc.
- Hideyuki Hayashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 8,847,181
- Issue date Sep 30, 2014
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Temperature controller for gas laser
- Patent number 8,811,438
- Issue date Aug 19, 2014
- Gigaphoton Inc.
- Yukio Watanabe
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Temperature controller for gas laser
- Patent number 8,787,413
- Issue date Jul 22, 2014
- Gigaphoton Inc.
- Yukio Watanabe
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Extreme ultraviolet light source apparatus, method for controlling...
- Patent number 8,502,178
- Issue date Aug 6, 2013
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Temperature controller for gas laser
- Patent number 8,498,317
- Issue date Jul 30, 2013
- Gigaphoton Inc.
- Yukio Watanabe
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Apparatus and method for measuring and controlling target trajector...
- Patent number 8,324,600
- Issue date Dec 4, 2012
- Gigaphoton Inc.
- Hideyuki Hayashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Temperature controller for gas laser
- Patent number 8,238,392
- Issue date Aug 7, 2012
- Gigaphoton Inc.
- Yukio Watanabe
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Pulsed laser control system
- Patent number 6,522,674
- Issue date Feb 18, 2003
- Komatsu Ltd.
- Motoki Niwano
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DROPLET TIMING SENSOR
- Publication number 20180348397
- Publication date Dec 6, 2018
- Gigaphoton Inc.
- Hideyuki HAYASHI
- G01 - MEASURING TESTING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND CONTROL METHOD F...
- Publication number 20150342015
- Publication date Nov 26, 2015
- Gigaphoton Inc.
- Hideyuki HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT AND DEVICE FOR GENE...
- Publication number 20150189730
- Publication date Jul 2, 2015
- Gigaphoton Inc.
- Masato MORIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND CONTROL METHOD F...
- Publication number 20140353528
- Publication date Dec 4, 2014
- Gigaphoton Inc.
- Hideyuki HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20140111635
- Publication date Apr 24, 2014
- GIGAPHOTON INC.
- Toru SUZUKI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20140098830
- Publication date Apr 10, 2014
- GIGAPHOTON INC.
- Takayuki YABU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROLLER FOR GAS LASER
- Publication number 20130294470
- Publication date Nov 7, 2013
- Yukio Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROLLER FOR GAS LASER
- Publication number 20130294469
- Publication date Nov 7, 2013
- Yukio Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR MEASURING AND CONTROLLING TARGET TRAJECTOR...
- Publication number 20130062539
- Publication date Mar 14, 2013
- GIGAPHOTON INC.
- Hideyuki HAYASHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TEMPERATURE CONTROLLER FOR GAS LASER
- Publication number 20120267343
- Publication date Oct 25, 2012
- Gigaphoton Inc.
- Yukio WATANABE
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20120228525
- Publication date Sep 13, 2012
- GIGAPHOTON INC.
- Masato MORIYA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS, METHOD FOR CONTROLLING...
- Publication number 20120175533
- Publication date Jul 12, 2012
- GIGAPHOTON INC.
- Masato MORIYA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHOD FOR MEASURING AND CONTROLLING TARGET TRAJECTOR...
- Publication number 20100294958
- Publication date Nov 25, 2010
- Hideyuki HAYASHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TEMPERATURE CONTROLLER FOR GAS LASER
- Publication number 20100217444
- Publication date Aug 26, 2010
- Yukio Watanabe
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...

Hideyuki Hayashi

Person

Patents Grantslast 30 patents

Droplet timing sensor

Extreme ultraviolet light generation apparatus

Extreme ultraviolet light generation apparatus and control method f...

Method for generating extreme ultraviolet light and device for gene...

Extreme ultraviolet light generation apparatus and control method f...

System and method for generating extreme ultraviolet light

Temperature controller for gas laser

Temperature controller for gas laser

Extreme ultraviolet light source apparatus, method for controlling...

Temperature controller for gas laser

Apparatus and method for measuring and controlling target trajector...

Temperature controller for gas laser

Pulsed laser control system

Patents Applicationslast 30 patents

DROPLET TIMING SENSOR

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND CONTROL METHOD F...

METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT AND DEVICE FOR GENE...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND CONTROL METHOD F...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

TEMPERATURE CONTROLLER FOR GAS LASER

TEMPERATURE CONTROLLER FOR GAS LASER

APPARATUS AND METHOD FOR MEASURING AND CONTROLLING TARGET TRAJECTOR...

TEMPERATURE CONTROLLER FOR GAS LASER

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS, METHOD FOR CONTROLLING...

APPARATUS AND METHOD FOR MEASURING AND CONTROLLING TARGET TRAJECTOR...

TEMPERATURE CONTROLLER FOR GAS LASER