Hideyuki IWATA

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Narita, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electron beam drawing apparatus and electron beam drawing method
- Patent number 10,074,507
- Issue date Sep 11, 2018
- NuFlare Technology, Inc.
- Hideyuki Iwata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam current quantity measuring method, multi-charged particl...
- Patent number 9,734,984
- Issue date Aug 15, 2017
- NuFlare Technology, Inc.
- Hideyuki Iwata
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTRON BEAM DRAWING APPARATUS AND ELECTRON BEAM DRAWING METHOD
- Publication number 20180019094
- Publication date Jan 18, 2018
- NuFlare Technology, Inc.
- Hideyuki IWATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM CURRENT QUANTITY MEASURING METHOD, MULTI-CHARGED PARTICL...
- Publication number 20160211114
- Publication date Jul 21, 2016
- NuFlare Technology, Inc.
- Hideyuki IWATA
- G01 - MEASURING TESTING