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Charged Particle Beam Device
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Publication number 20220122804
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Publication date Apr 21, 2022
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HITACHI HIGH-TECH CORPORATION
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Toshiyuki YOKOSUKA
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H01 - BASIC ELECTRIC ELEMENTS
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Charged Particle Beam Device
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Publication number 20200312615
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Publication date Oct 1, 2020
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HITACHI HIGH-TECH CORPORATION
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Toshiyuki YOKOSUKA
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H01 - BASIC ELECTRIC ELEMENTS
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CHARGED PARTICLE BEAM DEVICE
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Publication number 20190180979
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Publication date Jun 13, 2019
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Hitachi High-Technologies Corporation
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Toshiyuki YOKOSUKA
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H01 - BASIC ELECTRIC ELEMENTS
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Charged Particle Beam Device
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Publication number 20190103250
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Publication date Apr 4, 2019
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Hitachi High-Technologies Corporation
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Toshiyuki YOKOSUKA
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H01 - BASIC ELECTRIC ELEMENTS
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Charged Particle Beam Device
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Publication number 20180233320
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Publication date Aug 16, 2018
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Hitachi High-Technologies Corporation
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Akira IKEGAMI
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H01 - BASIC ELECTRIC ELEMENTS
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Charged Particle Beam Device
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Publication number 20180012725
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Publication date Jan 11, 2018
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Hitachi High-Technologies Corporation
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Toshiyuki YOKOSUKA
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H01 - BASIC ELECTRIC ELEMENTS
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Charged Particle Beam Device
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Publication number 20170345613
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Publication date Nov 30, 2017
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Hitachi High-Technologies Corporation
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Yuzuru MIZUHARA
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H01 - BASIC ELECTRIC ELEMENTS
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Charged Particle Beam Device
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Publication number 20170278671
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Publication date Sep 28, 2017
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Hitachi High-Technologies Corporation
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Toshiyuki YOKOSUKA
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H01 - BASIC ELECTRIC ELEMENTS
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CHARGED PARTICLE BEAM APPARATUS
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Publication number 20170025251
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Publication date Jan 26, 2017
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Hitachi High-Technologies Corporation
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Momoyo ENYAMA
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H01 - BASIC ELECTRIC ELEMENTS
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Charged-Particle-Beam Device
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Publication number 20160300690
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Publication date Oct 13, 2016
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Hitachi High-Technologies Corporation
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Akira IKEGAMI
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H01 - BASIC ELECTRIC ELEMENTS
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Charged Particle Beam Device
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Publication number 20160240348
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Publication date Aug 18, 2016
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HITACHI HIGH-TECHNOLOGIES CORPORATION
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Toshiyuki YOKOSUKA
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H01 - BASIC ELECTRIC ELEMENTS
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Charged Particle Beam Device
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Publication number 20160217967
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Publication date Jul 28, 2016
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Hitachi High-Technologies Corporation
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Hideto DOHI
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H01 - BASIC ELECTRIC ELEMENTS
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CHARGED PARTICLE BEAM DEVICE
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Publication number 20150357153
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Publication date Dec 10, 2015
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Hitachi High-Technologies Corporation
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Hiroshi MAKINO
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H01 - BASIC ELECTRIC ELEMENTS