Hideyuki Kobayashi

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 10,832,891
- Issue date Nov 10, 2020
- Tokyo Electron Limited
- Ryota Sakane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing method and processing apparatus
- Patent number 10,676,823
- Issue date Jun 9, 2020
- Tokyo Electron Limited
- Ryota Sakane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Focus ring, plasma etching apparatus and plasma etching method
- Patent number 8,192,577
- Issue date Jun 5, 2012
- Tokyo Electron Limited
- Daiki Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focus ring, plasma etching apparatus and plasma etching method
- Patent number 7,618,515
- Issue date Nov 17, 2009
- Tokyo Electron Limited
- Daiki Satoh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210130955
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Hiroshi NAGAIKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20180158650
- Publication date Jun 7, 2018
- TOKYO ELECTRON LIMITED
- Ryota Sakane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHOD AND PROCESSING APPARATUS
- Publication number 20180148838
- Publication date May 31, 2018
- TOKYO ELECTRON LIMITED
- Ryota Sakane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FOCUS RING, PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
- Publication number 20090255902
- Publication date Oct 15, 2009
- TOKYO ELECTRON LIMITED
- Daiki Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Focus ring, plasma etching apparatus and plasma etching method
- Publication number 20060102288
- Publication date May 18, 2006
- TOKYO ELECTRON LIMITED
- Daiki Satoh
- H01 - BASIC ELECTRIC ELEMENTS