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Hideyuki Nitta
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Kanagawa-ken, JP
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last 30 patents
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Patent Application
SUBSTRATE COOLING DEVICE AND SUBSTRATE TREATMENT SYSTEM
Publication number
20110290185
Publication date
Dec 1, 2011
Shibaura Mechatronics Corporation
Ryuta Ihara
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND METHOD F...
Publication number
20110092073
Publication date
Apr 21, 2011
SHIBAURA MECHATRONICS CORPORATION
Hideyuki Nitta
H01 - BASIC ELECTRIC ELEMENTS